excimer lamp

Abstract

The invention provides an excimer lamp, An outer electrode with light transmittance on at least one side is arranged on an outer surface of a discharge container, a start auxiliary electrode is arranged on the inner surface of the discharge container, and creeping discharge occurs from the start auxiliary electrode to the outer electrode, thereby not influencing normal discharge between the outer electrodes. The excimer lamp is characterized in that: a branched electrode is arranged on the outer electrode and composed of a root part extending along the pipe axle direction of the discharge container from the axial end edge of the outer electrode; and a branched part extending along the width direction of the discharge container from the front end of the root part, wherein the start auxiliary electrode is at least overlapped with the front end of the branched part of the branched electrode in the outer electrode.

Description

technical field [0001] The present invention relates to an excimer lamp having a pair of light-transmitting external electrodes on the outer surface of a discharge vessel, and more particularly to an excimer lamp having a start-up auxiliary electrode arranged on the inner surface of the discharge vessel. Background technique [0002] Conventionally, an excimer lamp is known in which a pair of external electrodes are arranged to face each other on the outer surface of the discharge vessel. The external electrodes formed on the light emitting surface of the discharge vessel are used For example, gold colloid is coated into a grid-shaped light-transmitting electrode. [0003] On the other hand, as an external electrode formed on the outer surface of the side that does not emit light opposed to the above-mentioned light-emitting surface, it is not necessary to have light-transmitting properties functionally, but in many cases, from the simplification of the manufacturing process...

AI Technical Summary

Problems solved by technology

[0013] However, with the recent demand for higher illuminance of excimer lamps, further higher input to the lamp is required. Even with the above-mentioned conventional structure, there is creeping discharge X from the starting auxiliary electrode 13 along the dendritic electrode. 14 and reaches the external electrode 12, its influence affects the normal discharge between the external electrodes 12

In the structure of the above-mentioned prior art, if this problem is to be avoided, the dendritic electrodes 14 can be extended longer along the direction of the tube axis, but this leads to a longer overall length of the lamp, taking into account the effective light-emitting length, which is not practical. appropriate, unacceptable

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