Testing structure for improving failure analysis efficiency of breakdown voltage of insulator and using method thereof
A technology of breakdown voltage and failure analysis, applied in the direction of testing dielectric strength, circuits, electrical components, etc., can solve the problem of inability to accurately locate the failure location, failure analysis, etc.
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[0019] The present invention may be embodied in several forms without departing from its spirit and essential characteristics. It should be understood that the foregoing examples are not limited to the foregoing details, and unless otherwise indicated, its spirit and essential characteristics should be generally understood. Accordingly, all changes and modifications falling within the cluster and range of the claims, or equivalents to similar clusters and ranges are intended to be embraced by the appended claims.
[0020] The test structure designed by the present invention to improve the efficiency of insulator breakdown voltage failure analysis includes: several parallel capacitors 10, the upper plate 101 of each capacitor 10 is connected to the first metal pad 1 through the first connection 201, each capacitor 10 The lower plate 102 is connected to the second metal pad 2 through the second connection 202, which also includes: the third metal pad 3, connected to the second co...
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