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Volume flow correction method for mass flow controller

A technology of mass flow and volume flow, applied in the direction of electrical testing/monitoring, etc., can solve problems affecting the accuracy of mass flow controllers and inaccurate measured values

Active Publication Date: 2014-08-13
BEIJING SDL TECH
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AI Technical Summary

Problems solved by technology

The measurement of the mass flow controller adopts the thermal principle, which directly measures the mass flow of gas, and due to factors such as working temperature, the mass flow will drift, resulting in inaccurate measured values ​​and affecting the accuracy of the mass flow controller

Method used

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  • Volume flow correction method for mass flow controller

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Embodiment Construction

[0017] The core of the present invention is to provide a volume flow correction method of a mass flow controller, which can correct the mass flow of the mass flow controller to volume flow, thereby avoiding measurement errors caused by mass flow drift and having high control accuracy , thereby improving the gas distribution accuracy of the standard gas distribution instrument.

[0018] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0019] Please refer to figure 1 , figure 1 It is a flowchart of a specific embodiment of the volume flow correction method of the mass flow controller provided by the present invention.

[0020] In a specific embodiment, the volume flow correction method of the mass flow controller provided by the present invention includes the following steps:

[0021] S...

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Abstract

The invention discloses a volume flow correction method for a mass flow controller. The method includes the steps: 1) inputting a reference truth value to the mass flow controller, and allowing the mass flow controller to receive the reference truth value and fit the reference truth value with a first correction factor to obtain a set value; and 2) inputting the set value into the mass flow controller, allowing the mass flow controller to obtain a read value according to the set value and fit the read value with a second correction factor to obtain and output a truth value, wherein the first correction factor and the second correction factor are both determined according to a reference value outputted by a standard volume flow meter arranged behind the mass flow controller. Therefore, mass flow of the mass flow controller can be corrected into volume flow by means of twice fitting of each of the first correction factor and the second correction factor with the reference truth value, measurement errors caused by mass flow drifting can be avoided, high control precision can be achieved, and gas distribution precision of a standard gas distribution instrument is further improved.

Description

technical field [0001] The invention relates to the technical field of volume flow correction, in particular to a volume flow correction method of a mass flow controller. Background technique [0002] With the continuous improvement of people's awareness of environmental protection, various gas pollution accidents have been highly valued by the country. The occurrence of pollution accidents is a risk factor that destroys the ecological environment and threatens human health; Instruments for gas indicators can monitor the content of dangerous gases in real time, and it is imminent to improve the level of environmental risk identification, assessment, prevention, and emergency response. [0003] The standard gas distribution instrument is a kind of gas heavy metal online monitoring system that can be widely used in the calibration of analytical instruments. According to the principle of proportional dilution, the standard gas distribution instrument dilutes the known concentra...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B23/02
Inventor 韩占恒关旭春
Owner BEIJING SDL TECH
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