Dynamic gas distribution and gas supply device

Abstract

A dynamic gas distribution and gas supply device, the carrier gas forms continuous standard gas under the action of the dynamic gas distribution and gas supply device, and alternately switchable gas distribution channels are formed inside the dynamic gas distribution and gas supply device. The gas distribution channel includes a flow control module, a first channel control module, a permeation module, and a second channel control module; wherein, after the carrier gas passes through the flow control module, it enters the permeation module in parallel under the deployment of the first channel control module. In the chamber, through the regulation of the second channel control module, the converging and / or connecting air ends are evacuated; by setting the permeation chambers as multiple permeation chambers that are independent of each other and do not interfere with each other, and the temperature can be independently controlled, the single The permeability in the permeation chamber is precisely controlled to compensate for the error caused by the difference between the actual temperature and the control temperature, and the permeability is compensated and corrected according to the actual temperature to improve the accuracy of gas distribution.

Description

technical field [0001] The invention relates to a mixed gas gas distribution device, in particular to a permeable dynamic gas distribution and gas supply device based on a permeation tube or / and cavity, belonging to the field of gas preparation technology equipment. Background technique [0002] Calibration gas is to test the accuracy of the analytical instrument, so it is necessary to select a suitable calibration method for calibration. The permeation tube method is a commonly used dynamic gas distribution method for dynamic gas distribution. The permeation is caused by the pressure gradient inside and outside the permeation tube. The permeation tube can be regarded as a stable microenvironment with constant internal pressure, especially suitable for low concentration, The configuration of standard gases with strong volatility, adsorption and corrosiveness, and the ability to produce large volumes of continuous standard gases has significant advantages in the preparation o...

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Problems solved by technology

However, the gas distribution device with this structure still needs to replace the permeation tube for the configuration of different gases, frequent constant temperature, and cumbersome operation

[0004] In order to improve the precision of gas distribution and mixing, and solve the problems of low precision of the gas mixing valve in the imported magnesium alloy mixing device, low mixing precision of protective gas ratio, high production cost, and difficulty in guaranteeing product quality, Chinese Patent No. CN 02222688 discloses a high-efficiency The precision gas mixing and gas supply device uses parallel gas paths to achieve the purpose of mixing different mixed gases in a single set of gas distribution devices through multi-position switching valves, and converts the dynamic gas supply and distribution process into a static gas supply and distribution process. Flow rate mixed gas supply system, uniform and stable gas supply, but this method is not suitable for the preparation of mixed gases containing high boiling point (normal temperature liquid) components

[0005] In order to overcome the deficiencies of the permeable gas distribution device with a single gas distribution type and specification and a small adjustable range of gas concentration, Chinese Patent No. CN200510044828.8 discloses a multi-channel permeable gas distribution device, which uses a multi-channel gas gating device to The carrier gas is divided into n channels with controllable flow and communicated with designated permeation chambers or tubes respectively. The divided carrier gas passes through different permeation tubes to obtain multi-channel mixed gas. Gas device, multi-channel permeation chambers or tubes are placed in the same constant temperature chamber, the environmental parameters in each channel are completely consistent, and independent control cannot be achieved without interfering with each other, and each time the target mixed gas of different specifications and / or varieties is prepared, It takes a long time to enter a stable microenvironment, and the entire calibration period is long, which makes the efficiency of the gas distribution device with this structure low

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