Pressure sensor

A pressure sensor and pressure technology, which is applied in the direction of fluid pressure measurement using piezoelectric devices, can solve problems such as damage to seals, and achieve the effects of increasing strength, improving fragility, and preventing deformation

Active Publication Date: 2012-11-14
FUJIKOKI MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] However, in the above-mentioned conventional pressure sensor, since the axis centers of the output guide pin and the lead wire are shifted, when manufacturing the pressure sensor, etc., the output guide pin may be greatly deformed when it is pulled in the direction of the lead wire.
In addition, the seal between the guide pin and the through hole is sealed, however, the seal itself may be damaged due to the above-mentioned pulling

Method used

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  • Pressure sensor

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Embodiment Construction

[0042] Hereinafter, modes for carrying out the present invention will be described in detail with reference to the accompanying drawings.

[0043] figure 1 Showing one embodiment of the pressure sensor of the present invention, the pressure sensor 1 includes: a pressure detection part 2 having a pressure detection element 21 inside and connected to a fluid inflow part 22; and a joint connection part 3 of the joint The connection portion 3 surrounds the pressure detection portion 2 and accommodates a wiring board (hereinafter referred to as a “substrate”) 31 to be connected to the pressure detection element 21 and an external output lead wire 32 .

[0044] The pressure detection unit 2 includes: a pressure detection element 21 ; a base 23 ; a carrier member 24 arranged opposite to the base 23 ; Liquid (oil) is sealed in the pressure-receiving space 26 between the base 23 and the diaphragm 25 . The pressure detection element 21 is fixed to the base 23 inside the pressure-recei...

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PUM

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Abstract

A pressure sensor (1) comprises a pressure detecting part (2) which possesses a pressure detecting element (21); an output guide pin (33) connected with the pressure detecting element and protruded to the exterior of the pressure detecting part; and a wiring substrate fixed with the output guide pin capable of being electrically connected with an external output conducting wire (32), and on which adjusting guide pins (36B,36C) connected with the pressure detecting element and protruded to the exterior of the pressure detecting part are fixed. Because not only the output guide pin, but also the adjusting guide pins used for correcting voltage, etc., are fixed on the wiring substrate together, the overall structure strengths of the output guide pin, the wiring substrate and the adjusting guide pin can be improved, and the vulnerability of the surrounding structure of the output guide pin can be improved. According to the invention, the tightness of the pressure detecting part can be kept, and the vulnerability of the surrounding structure of the output guide pin can be improved.

Description

technical field [0001] The present invention relates to a pressure sensor, in particular to a liquid-sealed pressure sensor in which liquid is sealed in a pressure-receiving space in which a pressure detection element is accommodated. Background technique [0002] Conventionally, various pressure sensors have been proposed in which a liquid is enclosed in a pressure-receiving space in which a pressure detection element is accommodated, and the pressure applied to the pressure detection chamber from the outside is transmitted to the pressure detection element through the liquid, thereby reducing the pressure from the pressure. The detection element outputs a voltage signal corresponding to the external pressure. [0003] As an example of the above-mentioned liquid-filled pressure sensor, Patent Document 1 describes a pressure sensor in which a sensor chip (pressure detection element) detects a pressure transmitted through an isolation diaphragm (Japanese: バリアダイアフラム), and the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/08
Inventor 高月修青山伦久
Owner FUJIKOKI MFG CO LTD
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