Pixel structure, as well as manufacturing method and display device thereof

Abstract

According to embodiments of the invention, a TFT array substrate, a manufacturing method of the TFT array substrate and a display device are provided. The method comprises: depositing a metal film on a substrate, and forming a gate electrode and a gate line by using a first patterning process; forming a gate insulating layer and a passivation layer in this order on the substrate to cover the gate electrode and the gate line; depositing a transparent conductive layer, a first source / drain metal layer and a first ohmic contact layer in this order, and forming a drain electrode, a pixel electrode, a data line, and a first ohmic contact layer pattern provided on the drain electrode by using a second patterning process; and depositing a semiconductor layer, a second ohmic contact layer and a second source / drain metal layer in this order, and forming a source electrode, a second ohmic contact layer pattern provided below the source electrode, and a semiconductor channel between the source electrode and the drain electrode by a third patterning process.

Description

technical field [0001] The present invention relates to the technical field of array substrates, in particular to a pixel structure, a manufacturing method thereof, and a display device. Background technique [0002] Thin Film Transis-Liquid Crystal Display (TFT-LCD) has the advantages of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. TFT-LCD devices are formed by pairing an array substrate and a color filter substrate. Gate lines and signal lines defining pixel regions are arranged to cross each other on the array substrate, and pixel electrodes and thin film transistors (TFTs) are arranged in each pixel region. Driving signals are applied to the gate lines, and image data are applied to the pixel electrodes through the signal lines. A black matrix is ​​arranged on the color filter substrate so that light cannot pass through the area other than the pixel electrodes, a color filter layer is ar...

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Problems solved by technology

[0003] However, traditional array substrates generally adopt five-mask (5Mask) or four-mask (4Mask) manufacturing processes. Array substrates manufactured using 5Mask or 4Mask processes have a large number of masks in the manufacturing process, and the investment in development The cost is relatively high; and the production line needs a large number of production lines for production due to the complexity of the manufacturing process, which increases the input cost of the production line

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