Cover plate-free carbon nanotube device structure and manufacturing method thereof
A technology of carbon nanotubes and device structures, which is applied in the field of nanoelectronic devices and sensors, can solve the problems of limited application range, difficulty in making devices, and difficulty in mass production, and achieve simplified process flow, simple device structure and manufacturing process, and improved Effect of Device Yield
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0030] The specific implementation steps of the present invention will be further described below in conjunction with the accompanying drawings, which are not drawn to scale for the convenience of illustration.
[0031] This embodiment provides a carbon nanotube sensor structure, which can be combined with MEMS technology as a carbon nanotube infrared and THz detector structure. The device structure is fabricated on a single crystal silicon substrate with a orientation, and the structure is as follows figure 1 As shown, it includes (100) single crystal silicon substrate 1 , horizontal single-walled carbon nanotube array 2 , oxide layer 3 , and metal electrode 4 in four parts. Wherein, the near-rhombic section groove in the (100) single crystal silicon substrate 1 is obtained by anisotropic wet etching on the basis of dry etching the deep groove. The opening of the groove is along the crystal direction, and the surface after wet etching is the (111) surface, such as Figure...
PUM
Property | Measurement | Unit |
---|---|---|
width | aaaaa | aaaaa |
depth | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com