Method for detecting initial position of planar motor

A planar motor and initial position technology, which is applied in the estimation/correction of motor parameters, electromechanical devices, control generators, etc., can solve the problems of structural design complexity and increased costs, and achieve reduced detection costs, precise motion positioning, Effect of Simplified Probing Process

Active Publication Date: 2012-11-21
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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Problems solved by technology

[0007] At present, the initial position detection methods of planar motors generally need to add other sensors (such as pressure sensors, Hall sensors, etc.) and corresponding signal processing electronic circuits to achieve, which not only increases the cost, but also increases the complexity of the structural design

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  • Method for detecting initial position of planar motor
  • Method for detecting initial position of planar motor

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Embodiment Construction

[0038] The method for detecting the initial position of the planar motor proposed by the present invention will be further described in detail below with reference to the drawings and specific embodiments. It should be noted that, in the following description, the X direction is the first horizontal direction, the Y direction is the second horizontal direction, and the Z direction is the vertical direction perpendicular to the first direction and the second direction.

[0039] The invention provides a method for detecting the initial position of a planar motor. The planar motor used is an air-floating coil type planar motor or a moving magnet type air-floating planar motor, which includes a stator, a mover and a position measurement sensor. The mover includes four three Phase coil group.

[0040] Such as Figure 1A and Figure 1B , the stator 1 of the planar motor is a segmented Hall permanent magnet array, and its spatial magnetic field distribution characteristics are that ...

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Abstract

The invention provides a method for detecting an initial position of a planar motor. The method comprises the following steps: using current ring closed-loop control and position ring PID (proportion integration differentiation) closed-loop control via the planar motor based on a position measuring sensor of the planar motor body; using noise motivation to detect fine initial positions of relative stators of each three-phase coil assembly of the planar motor rotator in sequence so as to complete the detection for the initial position of the planar motor; realizing multi-freedom precision motion of a photo-etching machine workpiece table without additional other sensors and corresponding signal processing electronic circuits, thereby simplifying the detecting process and reducing the detecting cost.

Description

technical field [0001] The invention relates to the application field of photolithography machine systems, in particular to a method for detecting the initial position of a planar motor applied to the multi-degree-of-freedom precision motion positioning of a photolithography machine workpiece table. Background technique [0002] The stator of the planar motor is composed of a permanent magnet array arranged in a plane, and the mover of the planar motor is composed of a coil array arranged on a plane. The method can realize three-degree-of-freedom precision motion positioning in the horizontal plane. Compared with the traditional stacked design of multiple single-degree-of-freedom linear motors, when the planar motor is used for multi-degree-of-freedom precision motion positioning of the lithography machine workpiece table, it has a simple structure, light weight, and high rigidity, and its mover is supported by air bearings. , no friction, these advantages make the rapid ac...

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Application Information

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IPC IPC(8): H02K11/00H02P6/16H02P21/14H02P23/14
Inventor 韩成超张志钢
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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