Dust-free room

A clean room and cabin technology, applied in agricultural buildings and other directions, can solve problems such as the reduction of clean room cleanliness, and achieve the effect of improving cleanliness and convenient operation.

Inactive Publication Date: 2012-12-26
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

And when the operator needs to frequently go back and forth between the clean room and the general environment, it is likely to reduce the cleanliness of the clean room.

Method used

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  • Dust-free room

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Embodiment Construction

[0010] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0011] see figure 1 , is a perspective view of the clean room of the present invention. The clean room 1 of the present invention includes a cabin body 10 , and at least one hatch door 11 is disposed on a side wall of the cabin body 10 . In this embodiment, the cabin body 10 is a cuboid, and a cabin door 11 is provided on one of the side walls 100 of the cabin body 10 perpendicular to the ground. The top 101 of the cabin body 10 is provided with at least one first dust discharge device 17 for discharging dust particles and preventing dust particles from entering.

[0012] A first material tray 12 is arranged in the cabin body 10, and is perpendicular to the side wall 102 of the cabin body 10 where the hatch door 11 is not provided, and a material inlet is also provided at the intersection of the first material tray 12 and the side wall 102 13 , the first t...

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Abstract

The invention discloses a dust-free room, which comprises a cabin body, at least one cabin door which is arranged on the sidewall of the cabin body and a first dust exhausting device which is arranged in the cabin body; the dust-free room further comprises a first material tray which is arranged in the cabin body and is vertical to a first sidewall which is not provided with the cabin door and comprises a plurality of meshes; a material inlet which is arranged on the first sidewall and is arranged on the upper side of the first material tray; a second dust exhausting bag which is arranged in the cabin body and on the upper side of the material inlet and is used for preventing the dust particles from entering into the cabin body along with the material which enters into the cabin body from the material inlet; and a material outlet which is close to the inner bottom of the cabin body and is arranged on the first sidewall and is used for moving out the material. With adoption of the dust-free room, functions of convenient operation and improving cleanliness can be achieved by arranging the material inlet and the material outlet on the sidewall of the cabin body, setting a mesh-shaped material tray in the cabin body and arranging the dust exhausting device on the upper side of the material tray.

Description

technical field [0001] The invention relates to a clean room structure. Background technique [0002] With the continuous advancement of semiconductor technology, the diameter of IC process wires continues to shrink, so micro-pollutants in the external air, such as sulfur-containing substances, have an increasing impact on process yield. In order to improve the process yield, the purification specifications of the production environment have been relatively increased, and the cleanliness requirements for the clean room have also been relatively increased. And when the operator needs to go back and forth between the clean room and the general environment frequently, it is likely to reduce the cleanliness of the clean room. Contents of the invention [0003] In view of this, it is necessary to provide a clean room structure that is easy to operate and can ensure the cleanliness of the clean room. [0004] A clean room includes a cabin body, at least one hatch door arranged...

Claims

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Application Information

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IPC IPC(8): E04H5/08
Inventor 陈登奎
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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