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167results about How to "Low cleanliness" patented technology

Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same

A semiconductor manufacturing apparatus comprising: a plurality of vacuum chambers corresponding to a plurality of processing sections necessary for manufacturing a semiconductor device; an exhaust device connected to each vacuum chamber; a plate shaped guide plate arranged at the bottom of each vacuum chamber and having a plurality of gas emission holes; and a gas supply source for supplying gas to the gas emission holes, wherein the plurality of vacuum chambers are adjacent to each other by way of a shutter, one of the two adjacent vacuum chambers includes a tray mounted on the guide plate for mounting a substrate to be performed with a predetermined process, a conveying function section having a conveying arm for moving the tray from one vacuum chamber to the other vacuum chamber along the guide plate, and a controlling function section, the controlling function section performing the control so as to open the shutter to communicate the two adjacent vacuum chambers, emit gas from the gas emission holes of the guide plate of the vacuum chambers, and move the tray in one vacuum chamber, which is floated by the emitted gas, from the guide plate of one vacuum chamber to the guide plate of the other vacuum chamber along the guide plate by means of the conveying arm.
Owner:SHARP KK

Flexible ultrasonic glue dipping device

The invention discloses a flexible ultrasonic glue dipping device. The flexible ultrasonic glue dipping device comprises a tank body, wherein the tank body is provided with an inner concave chamber for containing liquid resin, is of a two-layer structure and comprises an inner tank body and an outer tank body; a space for storing cycling medium is formed between the inner tank body and the outer tank body; the outer tank body is respectively provided with a liquid inlet and a liquid outlet which are respectively communicated with the space; and the outer wall of the outer tank body is provided with a flexible ultrasonic device with adjustable parameters such as frequency and power. The flexible ultrasonic glue dipping device disclosed by the invention has the advantages that ultrasonic waves produced by the ultrasonic device act on fiber and the liquid resin uniformly by means of the cycling medium to realize glue dipping, and after the glue dipping procedure is finished, when a glue dipping tank is cleaned, the ultrasonic waves also act on sewage in the tank body, therefore, for the glue dipping and cleaning processes, a physical means is adopted in the flexible ultrasonic glue dipping device, and on the basis of realizing glue dipping, the cleaning effect is improved, the cleaning process is simplified, and the influence on the reuse effect of the glue dipping tank is avoided.
Owner:ELECTRIC POWER RES INST OF GUANGDONG POWER GRID +1

Wide-recognition-range monitoring equipment based on face recognition technology

The invention relates to wide-recognition-range monitoring equipment based on the face recognition technology. The wide-recognition-range monitoring equipment comprises a sliding rail, a movable block, an adjusting mechanism, a camera and a clearing mechanism. The adjusting mechanism comprises a rotary block, a rotary shaft, a movable assembly, a rotary assembly, a swing assembly and two supporting plates. The rotary assembly comprises a first motor, a conveying belt, two driving wheels, two driving units and two driven units. Each driving unit comprises a connecting shaft, a first gear, a first gear rack and a limiting unit. According to the wide-recognition-range monitoring equipment based on the face recognition technology, the angle of the camera is adjusted through the adjusting mechanism, and therefore the monitoring recognition range is widened. The practicality of the monitoring equipment can be improved. Dust accumulated on a lens of the camera is cleared away through the clearing mechanism, it is avoided that the cleanliness degree of the camera is reduced as the use time of the camera is increased, and therefore the recognition precision of the monitoring equipment is improved.
Owner:MAANSHAN BEIYITONG INTELLIGENT TECH CO LTD

Spectral analysis method for replacing visible spectrophotometer

The invention discloses a spectral analysis method for replacing a visible spectrophotometer. The method comprises the steps of: selecting a full spectrum light source, a color developing vessel, a white balance color plate, and placing the white balance color plate around the color developing vessel containing a color developing standard solution, using an image sensor to align the standard solution and the white balance color plate, and collecting image information to obtain an accurate RGB value of solution color of the standard solution; putting the accurate RGB value corresponding to thestandard solution into a first-order calculation formula or a second-order calculation formula, and then obtaining a value of a concentration coefficient of the solution according to a mapping method;then replacing the standard solution with a to-be-tested sample solution, obtaining an accurate RGB value of the color of the to-be-tested sample solution, and substituting into the first-order calculation formula or the second-order calculation formula known the concentration coefficient to obtain a concentration C of a to-be-tested sample. The method does not need to be isolated from an external light environment, the cleanliness requirements of the to-be-tested sample solution and a device are low, and experimental steps are simple, easy to operate, and high in accuracy.
Owner:侯延辉

Direct evaporation integral heat pipe exchanger

The invention discloses a direct evaporation integral heat pipe exchanger, which comprises a condensation end and an evaporation end, wherein the condensation end and the evaporation end are combined and mounted into a whole; the condensation end comprises a wet film, a sprayer, a water tank, an intake air fan and a condensing working medium coil; the intake air fan is positioned between the wet film and the condensing working medium coil; the sprayer is positioned above the wet film; a water inlet of the sprayer is connected with a water outlet of the water tank through a water pipe; the evaporation end comprises an outtake air fan and an evaporating working medium coil; the evaporating working medium coil is positioned on the air outlet side of the outtake air fan; and the condensing working medium coil and the evaporating working medium coil are connected through a connection working medium pipe and are separated through a thermal insulation separation plate. According to the invention, the efficient direct evaporation integral heat pipe exchanger is formed by applying the direct evaporation cooling mode, which has a cooling effect similar to that of the traditional water cooling mode, to a heat pipe system, in this way, air cooled through direct evaporation efficiently cools the condensing working medium coil, and the efficient cooling effect and the high energy saving rate of the integral heat pipe exchanger for indoor air are ensured.
Owner:四川澄观节能环保科技有限公司

Preparation of hydrodesulfurization catalyst for coking benzene and using method of the catalyst

A hydrodesulfurization method of coking benzene is provided. A preparation process of a hydrodesulfurization catalyst used in a hydrodesulfurization reaction includes: respectively dipping an aluminium oxide-titanium dioxide mixed power carrier into solutions containing active metal elements comprising molybdenum, nickel, cobalt and tungsten, with the solutions containing citric acid; dipping a NaZSM-5 molecular sieve into a solution containing copper and/or zinc; drying; calcinating; mixing the dipped aluminium oxide-titanium dioxide mixed power carrier and the dipped NaZSM-5 molecular sieve; processing the coking benzene by a rectifying tower before hydrodesulfurization; and performing pre-hydrogenation, main hydrogenation and removal of inorganic sulfur to finish sulfur removal. The NaZSM-5 molecular sieve loaded with an active component has an effect of selective adsorption for thiophene. The aluminium oxide-titanium dioxide mixed power carrier loaded with the active metals has good catalytic hydrogenation effects for the thiophene. By cooperation of the NaZSM-5 molecular sieve loaded with the active component and the aluminium oxide-titanium dioxide mixed power carrier loaded with the active metals, good removing effects can be achieved even at a low reaction temperature. The citric acid promotes formation of an active phase, improves hydrogenation activity of the catalyst and prolongs maintaining time of the activity of the catalyst.
Owner:BEIJING SJ ENVIRONMENTAL PROTECTION & NEW MATERIAL CO LTD
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