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46results about How to "Satisfied with precision" patented technology

Semiconductor manufacturing apparatus and semiconductor manufacturing method using the same

A semiconductor manufacturing apparatus comprising: a plurality of vacuum chambers corresponding to a plurality of processing sections necessary for manufacturing a semiconductor device; an exhaust device connected to each vacuum chamber; a plate shaped guide plate arranged at the bottom of each vacuum chamber and having a plurality of gas emission holes; and a gas supply source for supplying gas to the gas emission holes, wherein the plurality of vacuum chambers are adjacent to each other by way of a shutter, one of the two adjacent vacuum chambers includes a tray mounted on the guide plate for mounting a substrate to be performed with a predetermined process, a conveying function section having a conveying arm for moving the tray from one vacuum chamber to the other vacuum chamber along the guide plate, and a controlling function section, the controlling function section performing the control so as to open the shutter to communicate the two adjacent vacuum chambers, emit gas from the gas emission holes of the guide plate of the vacuum chambers, and move the tray in one vacuum chamber, which is floated by the emitted gas, from the guide plate of one vacuum chamber to the guide plate of the other vacuum chamber along the guide plate by means of the conveying arm.
Owner:SHARP KK

Flow rate measuring method and flowmeter, flow rate measuring section package used for them and flow rate measuring unit using them, and piping leakage inspection device using flowmeter

Measurements are obtained by a computing unit based on an output Vh from an indirectly-heated constant-temperature controlling flow rate measuring section (16) and an output Vout from a two-constant-point temperature difference detecting flow rate measuring sections (18a, 18b). In the flow rate measuring section (16), a heating element (163) is feedback-controlled based on a detected temperature by a heat sensing element (162) to obtain an output Vh based on the feedback-controlled condition. An output Vout is obtained from flow rate measuring sections (18a, 18b) based on the detected temperature difference between a heat sensing element (182) disposed on the liquid-flow-direction upstream side of the flow rate measuring section (16) and a temperature sensing element disposed on the downstream side. A computing unit outputs as a measurement a flow rate obtained based on the output Vh in a flow rate region where a flow rate is larger than a predetermined boundary flow rate, and outputs as a measurement a flow rate obtained based on the output Vout in a flow rate region where it is less than a boundary flow rate. Accordingly, a flow rate is measured with good precision and sensitivity over a wide flow rate range from a trace-amount flow rate region to a comparatively large flow rate region.
Owner:SAN-A

Process for Producing Granular Solid Matter from Coal Ash as Raw Material and Apparatus Therefor

InactiveUS20100108788A1Stable productionHydrating reactivity of a coal ash can be estimatedTransportation and packagingSolid waste disposalPulverized fuel ashSolid matter
A method of estimating the hydration reactivity of coal ash with high precision and determining the amount of milling water for obtaining a milling product in funicular form at the stage of milling; and a molding method being free from the problem of adhesion to a pressurization board at the stage of molding after the milling. When any collected coal ash exhibits a corrected basicity ((CaO+Fe2O3+MgO) / SiO2 (weight ratio)) of 0.1 or higher and a reactivity index (corrected basicity / (R2O / Al2O3) (weight ratio)) of 10 or higher, the coal ash as a raw ash is transferred to raw ash silo (2). Otherwise, the coal ash is transferred to waste ash silo (3). The raw ash within the raw ash silo (2) is poured in mill (8), and lime and gypsum are added and further milling water is charged thereto and milled. The amount of milling water is regulated so that with respect to agitator power per weight of material milled by the mill, the ratio of (average of power during 30 to 40 sec after completion of water charging) / (power at idling) ranges from 3 to 4, and so that with respect to agitator power per weight of material milled during 30 to 90 sec after completion of water charging, the ratio of (width of power fluctuation) / (average of power) ranges from 0.1 to 0.3.
Owner:JAPAN COAL ENERGY CENT +1
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