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43results about How to "Increase exposure area" patented technology

Stepping type non-mask digital exposure device based on digital micro-lens array

InactiveCN101320222AAvoid high costsStrong technical extensibility and process compatibilityMirrorsPhotomechanical exposure apparatusPiece tableImage reproduction
The invention discloses a stepping-type non-mask digital exposure device based on the digital micro-mirror array, which can utilize the method of replacing digital micro-mirror array by a traditional mask plate and combine the characteristics of a projecting exposure system to realize the system digital flexible exposure; patterns and images to be exposed are sent to the digital micro-mirror array by a computer to form a digital mask; then illuminating light treated by homogenization and collimation irradiates the digital micro-mirror array, and the illuminating light is treated by the spatial light modulation by the mask images on the digital micro-mirror array; the patterns and the images on the digital mask plate are copied to a photo-etching sample by a projection objective system; the photo-etching sample is arranged on a high-precision X-Y direction movable work-piece table and steps by the work-piece table; the patterns of all exposure sub-fields are orderly formed on the focal plane by the digital micro-mirror, and are jointed to obtain an exposure image or pattern with larger area. The device has strong technological extensibility and technique compatibility, and is easy to apply to the common engineering practices.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI

Back-illuminated image sensor and forming method thereof

A back-illuminated image sensor and a forming method thereof are provided, the forming method comprising: providing a semiconductor substrate, the semiconductor substrate including a first side and asecond side opposite to the first side, wherein a plurality of discrete photosensitive regions are formed in the semiconductor substrate on the first side, the photosensitive regions being adapted tosense light incident from the second side; Forming a first dielectric layer on a second side surface of the semiconductor substrate; Forming a transparent color filter layer correspondingly on the surface of the first dielectric layer above the partial number of photosensitive regions; Forming a light-absorbing material layer covering surfaces of the transparent color filter layer and the first dielectric layer; Etching the light-absorbing material layer without a mask to form an opaque sidewall on the sidewall surface of the transparent color filter layer; a color filter layer is formed on the surface of the first dielectric layer between the transparent filter layers. The back-illuminated image sensor formed by the method of the invention improves the performance of anti-crosstalk, and has the advantages of simple process and high integration level.
Owner:HUAIAN IMAGING DEVICE MFGR CORP

Hexagonal boron nitride deep ultraviolet photoelectric detector with embedded MSM structure and preparation method thereof

The invention discloses a hexagonal boron nitride deep ultraviolet photoelectric detector with an embedded MSM structure and a preparation method thereof, and belongs to the technical field of semiconductor photoelectric detection. The hexagonal boron nitride deep ultraviolet photoelectric detector is composed of a c-axis sapphire substrate layer, a hexagonal boron nitride layer, an embedded MSM electrode structure layer and a hexagonal boron nitride cladding from bottom to top, and the embedded MSM electrode structure layer is of an interdigital electrode structure. The MSM electrode is embedded in the hexagonal boron nitride layer, and the hexagonal boron nitride cladding covers the electrode, so that the exposure area is increased equivalently, and the collection range of photon-generated carriers can be increased to the greatest extent; the carrier mobility in the hexagonal boron nitride layer is far higher than the interlayer mobility, so that the embedded MSM structure is beneficial to improving the responsivity and the response speed of the device; and meanwhile, the electrodes are embedded in the hexagonal boron nitride film, so that the electrodes can be prevented from falling off and being stained, and the stability of the device is ensured.
Owner:JILIN UNIV

Exposure Rotary Fixture

The invention discloses a rotary jig for exposure. The rotary jig comprises a support frame and an accommodating assembly, wherein the support frame is provided with two opposite positioning plates; the accommodating assembly is rotationally arranged on the inner sides of the two positioning plates and comprises two inner frame plates, a ratchet mechanism, two rotating shafts, a plurality of fixedshafts and a plurality of clamping strips; the two inner frame plates are located on the inner sides of the two positioning plates; the ratchet mechanism is located between one of the two inner frameplates and one of the two positioning plates. The rotating shafts penetrate through the two inner frame plates and the two positioning plates, and one of the two rotating shafts penetrates through the ratchet mechanism; two ends of each fixed shaft are fixed at corners of the two inner frame plates respectively. Each clamping strip is detachably bridged on the two inner frame plates. The ratchetmechanism can allow the accommodating assembly to rotate on the support frame at multiple positioning angles, and therefore, multiple parts of a substrate can be exposed on the premise that the substrate is not taken down in the exposure process. The rotary jig for exposure can increase the output efficiency and the cost of the jig can be reduced.
Owner:INTERFACE TECH CHENGDU CO LTD +2

Plane reflection type compound eye cold light source exposure system

A plane reflection type compound eye cold light source exposure system belongs to the photo etching technical field, which comprises a lamp source group, a polygonal mirror group device, a reflector group and an exposure device. The plane reflection type compound eye cold light source exposure system is characterized in that the polygonal mirror group device comprises an upper lens mount and a lower lens mount, wherein the upper lens mount is tightly laminated on the lower lens mount; the upper lens mount comprises an upper disc, an upper lens pressing ring and upper disc reflectors, whereinthe upper lens pressing ring is arranged between the upper disc and the upper disc reflectors, the upper disc reflectors are tightly and annularly arranged in a ring to be arranged in the upper disc,thelower lens mount has a similar structure as the upper lens mount; the reflector group comprises a small reflector group and a large reflector group, wherein the small and the large reflector groups a re parallel and oppositely arranged, having an angle of 45 degrees with the horizontal plane. A photo etching machine is characterized by comprising the plane reflection type compound eye cold light source exposure system. The invention provides a position arrangement of multilayer reflectors, to improve exposure uniformity and expand exposure area.
Owner:SHANGHAI XUEZE OPTICAL MECHANICAL

Low-speed motion control method and system applied to LCOS system phase modulation workbench

The invention discloses a low-speed motion control method applied to a phase modulation workbench of an LCOS system, which comprises the following steps: carrying out data processing on a large-format processing graph and dividing the large-format processing graph into a plurality of graph blocks, and controlling the workbench to move to a specified position corresponding to a two-dimensional physical coordinate by a motion controller; uploading the graphic block file to an LCOS board card memory, and displaying the graphic block file on an LCOS panel; enabling the motion controller to control a pulse light source switch to form primary exposure; and enabling the workbench to move to a designated position corresponding to the next two-dimensional physical coordinate until the two-dimensional physical coordinate points of the whole large-format processing graph are executed. According to the invention, the characteristics of large pulse laser energy, short pulse width and high repetition frequency are utilized, single-frame polarization pattern recording is realized based on a single pulse, and the advantages of large exposure area, high efficiency and good reliability are realized by accurately controlling the movement of the workbench.
Owner:SUZHOU UNIV +1

Cold light source exposure machine

A cold light source exposure machine comprises a support, a slide holder, an exposure mechanism and a vertical adjusting mechanism; the slide holder is horizontally fixed at the lower end of the support; the vertical adjusting mechanism is used for adjusting the height of the exposure mechanism; the exposure mechanism comprises an ultraviolet light source, a polygonal mirror group, a reflector group, a mechanical shutter and a housing; the polygonal mirror group and the reflector group are both arranged in the housing; the polygonal mirror group comprises a plurality of reflectors which are annularly, uniformly and tightly arranged; the ultraviolet lamp source is arranged at the central point of the polygonal mirror group; the reflector group comprises a first reflector and a second reflector; the first reflector and the second reflector are oppositely arranged in parallel and form an included angle of 45 degrees with the horizontal direction; the first reflector is arranged right below the ultraviolet lamp source; the mechanical shutter is transversely arranged between the first reflector and the second reflector; and a collimating mirror is arranged under the second reflector. Accumulation of the thermal area on the slide holder of the exposure machine is avoided, the exposure efficiency is improved, the energy attenuation of ultraviolet light is greatly reduced, and the exposure area is enlarged.
Owner:四川上特科技有限公司

Large scale projection type printing-down apparatus

The invention relates to a large scale projection type printing-down apparatus, which comprises a tube and a lampshade. The tube is arranged in the lampshade. The printing-down apparatus also comprises a printing-down frame, elevating devices, a turning device, a backboard, and a vacuumizing device. The printing-down frame is in a rectangular shape, glass is arranged in the printing-down frame, four corners of the printing-down frame are provided with elevating devices, the elevating devices press the backboard on the glass tightly; the backboard is provided with a suction hole; the suction hole is connected to the vacuumizing device, which extracts the air between the backboard and the glass; the printing-down frame is installed on the turning device, the turning device converts the horizontal printing-down frame into a vertical state; and the lampshade is arranged on one end of the turning device and is right opposite to the vertical printing-down frame. The tube and the printing-down apparatus are separated, the heat dissipation is good, the exposure area is enlarged through the projection mode, the UV diffraction is avoided, the exposure effect is good, the image distortion isavoided, fine lines can be manufactured, and the printing-down apparatus is suitable for large scale printing-down. Furthermore, the printing-down apparatus has the advantages of simple structure, reasonable design, low cost, simple operation, convenience, and high safety.
Owner:昆山良品丝印器材有限公司
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