74 results about "Piece table" patented technology

The invention discloses a photoetching machine projection objective wave aberration on-line detector and a method. A diffuser is integrated on an object space mask plate which is arranged on the object plane of a projection objective, fixed, supported and driven by an object space work piece table in the photoetching machine; an image space mask plate is arranged on the image plane of the projection objective, supported and driven by an image plane work piece table. A collimator objective is arranged after the image surface of the projection objective; and the focal plane of the object space of the collimator objective is coincided with the image plane of the projection objective. Shearing mechanism is arranged between the projection objective and a photoelectric detector. The invention can realize the continuous tunableness of the shear ratio and increases the measuring sensitivity and measuring accuracy; secondly, a square hole is used for expanding the light source, thus increasing the utilization factor of the light intensity of the exposure light source, the measuring speed and measuring accuracy; and finally, the system error self-calibration technology can rapidly obtain the wave aberration of the projection objective with high precision.

An apparatus and method maintain immersion fluid in the gap adjacent to the projection lens during the exchange of a work piece in a lithography machine. The apparatus and method include an optical assembly that projects an image onto a work piece and a stage assembly including a work piece table that supports the work piece adjacent to the optical assembly. An environmental system is provided to supply and remove an immersion fluid from the gap between the optical assembly and the work piece on the stage assembly. After exposure of the work piece is complete, an exchange system removes the work piece and replaces it with a second work piece. An immersion fluid containment system maintains the immersion liquid in the gap during removal of the first work piece and replacement with the second work piece.

The invention discloses a planar magnetic field scanning and imaging system based on a Hall sensor. The planar magnetic field scanning and imaging system comprises a three-dimensional mechanical displacement platform, a lower computer controller based on STM32, a Hall sensor, a differential amplification circuit module, a data acquisition card, upper computer control and data analyzing and processing software and a constant flow source, wherein a component to be tested is connected with the constant flow source and is arranged on a sample piece table of the three-dimensional mechanical displacement platform; the three-dimensional mechanical displacement platform and the Hall sensor are started, and then the motion parameters of the displacement platform are set according to the size of a sample piece; scanning type acquisition is carried out on the amplitude of the magnetic field on the surface of a measured conductor by the displacement platform which is started, together with the Hall sensor; the magnetic field information acquired by the sensor is sent to an upper computer by the data acquisition card; the scanned image of the magnetic field distribution on the surface of the sample piece to be tested can be displayed by the upper computer. The planar magnetic field scanning and imaging system can be used for scanning and imaging the magnetic field distribution condition of the surface of electrified material, so that the internal structure of the material is further analyzed according to the magnetic field distribution; therefore, the system has a certain practical value for detecting the integrity condition in the material in a nondestructive way.

The invention discloses a thickness consistency detection device. The device comprises a spectrum confocal displacement sensor, a sensor adjusting unit, a work-piece rotary table, a cantilever rotarytable, a cantilever rotary table adjusting unit, a work-piece table, a cantilever, a weight, and a main controller. The device disclosed by the invention can be used for the thickness consistency measurement and analysis of the large-aperture and high-precision material. The device disclosed by the invention is simple, compact and stable in structure, and the engineering is easy to realize; the movement function is executed by using an air-floating revolving shaft system, the vibration in dynamic measurement is greatly reduced, and the quick and precise measurement can be realized.

The invention relates to a large-module screw taper gear processing lathe. Wherein, said lathe has X straight track and relative X sliding table; the crane has Z straight track 15 and relative beam; said beam has Y straight track and relative blade box; the blade box has rotational blade main axle mounted with blade; the X sliding table is mounted with work piece table mounted with screw taper gear; said table can be disc one or axle one. The invention has simple structure, high stability and high reliability.

The invention provides a hole making system for an intelligent AGV lifting robot. The hole making system comprises mecanum wheel assemblies, a vehicle body, a laser emitter, a positioning camera, a test piece table, a six-axis robot, an end effector, a laser scanner, a grating ruler, a lifting driving device, self-adaptive supporting legs, a lifting platform and a linear guide rail. According to the hole making system, the mecanum wheel assemblies are driven by a servo motor and a storage battery, so that omni-directional movement is realized, and meanwhile, an external power source is not required to be connected; the laser emitter and the positioning camera are used for positioning and measuring, so that accurate positioning and position deviation feedback are realized; in the hole making process, the three self-adaptive supporting legs are used for forming a triangular stable support for the vehicle body so that the robot can overcome the influence caused by uneven ground plane, andhole making precision is guaranteed; accurate lifting of the six-axis robot is completed by the lifting mechanism and a grating ruler measuring control system, so that the working space of the robotis greatly expanded; and The hole making system has the advantages that the assembling quality and efficiency of an aircraft can be greatly improved, and meanwhile, assembling cost of the aircraft isreduced.

The present invention discloses a projection exposure apparatus, which comprises an illumination system, a mask table for bearing a mask, a projection object lens and a work-piece table for bearing a substrate, wherein the illumination system generates an illumination light beam to irradiate the mask, and the projection object lens projects the pattern on the mask onto the substrate surface. The projection exposure apparatus is characterized by further comprising a focusing leveling device, wherein the focusing leveling device generates a plurality of measurement points in the visual field of the projection object lens, and each measurement point comprises at least three measurement sub-light spots. According to the present invention, with the projection exposure apparatus, the production efficiency of the exposure equipment can be substantially improved, and the equipment use cost can be reduced; the screen with the large size can be obtained through the single exposure so as to reduce the complex process and the increased manufacturing cost caused by the splitting exposure; and the synchronous scanning technology, the image sensor technology and the exposure process focal plane real-time control technology are utilized to substantially increase the projection exposure apparatus overlay precision and the imaging quality and meet the low-cost and high-yield production requirements.

The invention discloses a calibration device and a calibration method for a photoelectric detector. The calibration device comprises a beam splitter prism, an absolute detector and a processing unit; the beam splitter prism is arranged above the photoelectric detector; the photoelectric detector is arranged on a work-piece table; a lighting light is divided by the beam splitter prism into a first measuring light and a second measuring light; the absolute detector is arranged at one side of the beam splitter prism; the second measuring light comes into the absolute detector; the first measuring light comes into the photoelectric detector; the processing unit is used for calculating the light intensity of the second measuring light measured by the absolute detector and the light intensity of the first measuring light measured by the photoelectric detector, building a relation between the photoelectric detector and the absolute detector, and calibrating gain and offset of the photoelectric detector. The calibration device and the calibration method are simple to operate; environmental pollution of a human factor on inside of a photoetching machine is reduced; the test accuracy is improved; and the light measured by the absolute detector and the light measured by the calibration detector are the same light, so that the situation of transmittance change caused by volatility of a light source is avoided, thereby improving the measurement accuracy.

The invention provides an alignment system and an alignment method for a photolithographic device, which are used for implementing alignment of a work piece table and a mask or of the work piece table and a mask table. The alignment system for the photolithographic device comprises a light source module, an objective lens module, a detection module, an alignment mark and a reference mark. The alignment mark is arranged at the mask or the mask table, and comprises a first square mark for coarse alignment and a first grating mark for fine alignment. The reference mark is arranged at the work piece table, and comprises a second square mark for coarse alignment and a second grating mark for fine alignment. The alignment mark in the alignment system has extremely high contrast ratio in a small scanning range, so that the signal-to-noise ratio of scanning signals is greatly improved, post treatment on the scanning signals is simplified and efficiency is improved.

The invention discloses a system and a method for performing lock-phase thermography chromatography characterization on microdefects of solar cells. The system comprises a short-wave infrared camera,a medium-wave infrared camera, a data acquisition card, a computer, a three-dimensional mobile station, a metal sample piece table, a sample piece clamping device and a direct current (DC) power supply, wherein the computer is used for controlling the data acquisition card to control the DC power supply to be triggered and carrying out amplitude modulation change on sample pieces, and simultaneously controls the data acquisition card to control the short-wave infrared camera and the medium-wave infrared camera to synchronously trigger the acquisition of an image sequence; images acquired by the short-wave infrared camera are transmitted to the computer, so that the lateral distribution and positioning of the defects of the sample pieces can be obtained; images acquired by the medium-wave infrared camera are transmitted to the computer, so that an amplitude figure and a phase diagram at the frequency can be obtained; amplitude figures and phase diagrams at different frequencies are obtained by changing the frequency; the deep chromatography results of the sample pieces can be obtained by using lock-phase thermography chromatography software. The method provided by the invention is anew rapid, large-area, visual and accurate infrared heat wave nondestructive testing method.

The invention refers to a machine tool for machining one or more work pieces, wherein the work piece is held indirectly or directly by a clamping device in the machine tool on or at a non-rotary work piece table or a work piece table rotating around at least one axis.

The invention is characterized in that the clamping device comprises at least one clamping element interacting indirectly or directly with the work piece, and an electric motor is provided for generating the clamping power that is in active connection with the clamping element.

The invention discloses a zero-position sensor, which comprises a host module (1). The host module (1) comprises a base (11). A laser collimating mirror (16) and a light spot position detecting device (17) are arranged on the base (11). The light spot position detecting device (17) is used for receiving parallel beam reflected by a reflective module (2) installed on a work-piece table (3). The reflective module (2) is used for reflecting laser beam emitted by the laser collimating mirror (16) in parallel. The light spot position detecting device (17) is electrically connected with a printed circuit board (15) for converting an inducted optical signal into an electrical signal. The zero-position sensor disclosed by the invention is applied to a position measurement system and has the advantage of being high in measurement precision.

The invention relates to a photoetching machine in-situ multichannel imaging quality detection apparatus and a photoetching machine in-situ multichannel imaging quality detection method, wherein the photoetching machine in-situ multichannel imaging quality detection apparatus comprises a photoetching machine light source, an illumination system, a mask table, a projection object lens, a work-piece table and a computer, and further comprises an object surface grating plate and a wavefront aberration sensor. According to the present invention, the photoetching machine imaging qualities such as the wavefront aberration, the distortion and the field curvature are detected by using the photoetching machine in-situ multichannel imaging quality detection apparatus so as to improve the parallel channel number and the detection speed of the imaging quality detection.

The invention discloses a data input method and device, a terminal and a computer readable storage medium, wherein the method comprises the steps of receiving a data reporting instruction which comprises a service scene identifier; querying a segment table identifier corresponding to the service scene identifier and a preset storage process and a field identifier corresponding to the segment tableidentifier according to a preset segment table information table; obtaining original data corresponding to the service scene identifier and the field identifier; transmitting the original data into the preset storage process; and executing the preset storage process, and generating a report data table corresponding to the segment table identifier. According to the present invention, the preset storage process is set for different service scenes, so that the maintenance efficiency of data report generation is improved.

The invention relates to a multifunctional round sculpture reproducer, which is characterized in that the reproducer body is provided with vertical and mutually parallel left side frame and right side frame. A pair of parallel longitudinal slipways are arranged on the top surfaces of the left side frame and right side frame along the Y direction; the reproducer head is provided with a reproducer head crossbeam along the X direction, the both ends of the reproducer head crossbeam are matched with the longitudinal slipways in a slipping way along the Y direction, at least two operating reproducer heads and a sample piece reproducer head are connected on the reproducer head crossbeam in series, and are matched with the reproducer head crossbeam in a slipping way along the X direction; the carved piece table frame is provided with rotating rods positioned below the reproducer head and levelly arranged, various carved piece seats are all arranged on the rotating rods, the various carved piece seats are rotating disks sleeved on the rotating axles vertical to the rotating rods, and the longitudinal distance between the rotating rods and the reproducer head can be adjusted relatively; the placement mechanism is provided with a level placement frame and a vertical placement frame. The invention can reproduce, enlarge or reduce the round sculpture works, and can complete the reproduction to internal carving and external carving, intaglio and curvette, shallow-and-deep relief, hollow-out vulture, and three-dimensional sculpture and so on.

The invention provides a gap detection device based on super-resolution lithography. The light emitted by a light source is introduced into an optical fiber collimating mirror through a Y-shaped optical fiber, and is divided at a semi-transparent and semi-reflective window of a mask. One beam of light is reflected back into the optical fiber collimating mirror, and the other beam of light is transmitted by the semi-transparent and semi-reflective window of the mask, reflected by the surface of a substrate and received by the optical fiber collimating mirror through the semi-transparent and semi-reflective window of the mask. At the moment, a phase difference is generated due to the different optical paths of the two beams of light. The phase difference is detected through a spectrometer, and the phase difference corresponding to different wavelength is analyzed in a principal computer. Thus, the measurement of the absolute gap between the mask and the substrate is realized. The absolute value of the optical path difference between the substrate and the mask can be obtained, and further, the phase difference caused by the optical path difference between the substrate and the mask can be obtained, and the absolute gap between the mask and the substrate can be obtained. The gap is eliminated by controlling a nano work piece table, and gap exposure is realized. Therefore, a super-resolution lithography device is effectively protected, and the quality of lithography graphics is ensured.

The invention relates to a processing method for improving a solar cell work stability and a device thereof comprising: irradiating a solar cell or a solar cell film by using a laser with a spectral wave length of 10. 06 micron so as to make an internal crystal phase arrangement of the solar cell or the solar cell film to tend to consistent, usefully improving and stabilizing the light energy absorption efficiency, the electric energy conversion efficiency and the output power of the solar cell, implementing the improvement of the attenuation of the output power and improving the work stability and prolonging the effective work life interval. The device comprises an operation control box, a CO2 laser generator and a work piece irradiation table. The operation control box and the CO2 laser generator are interconnected by conductors. The CO2 laser generator and the work piece irradiation table are interconnected by a light path. The solar cell or the solar cell film is arranged on the work piece table for irradiation. The output power attenuation of the solar cell made after the processing is less than 5, the effective work life interval is at least prolonged to 40 years so as to satisfy any special use demands.

A high throughput drilling system for printed circuit board hole formation. Two spindles are disposed at each spindle station, doubling the number of holes produced in a given time period. Each spindle in connected to an overhead linear drive by a mini slide. A first set of the spindles, one for each spindle station, is driven by a first X axis linear drive. A second set is driven by a second X axis linear drive. The work piece table is elongated to support work pieces for all stations, and is supported by a set of bearing guides, with outrigger bearings coupled to the table by flexure mounts that relieve stress due to differential temperature expansion rates between the work piece table and the base table. High speed spindles are employed to obtain higher productivity, with larger holes routed by router tools, eliminating the need for stocking large drill sizes on the system tool changer.