System and method for performing lock-phase thermography chromatography characterization on microdefects of solar cell
A solar cell and thermal imaging technology, which is applied in the direction of optical testing of flaws/defects, material analysis, and material analysis through optical means, can solve problems such as accelerating the lateral positioning and identification of defects, and achieve improved detection capabilities, large detection areas, and improved The effect of the signal-to-noise ratio
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specific Embodiment approach 1
[0031] Specific implementation mode one: as figure 1 and 2 As shown, the lock-in thermal imaging tomography characterization system for integrated circuit micro-defects provided in this embodiment consists of a three-dimensional mobile stage, a short-wave infrared camera 3, a metal sample stage 5, a solar cell sample 6, a sample holding device 7, DC power supply negative output line 8, DC power supply positive output line 9, lock-in thermal imaging tomography software 10, computer 11, DC power supply 12, first signal transmission line 13, data acquisition card 14, second signal transmission line 15, third signal The transmission line 16, the fourth signal transmission line 17, the fifth signal transmission line 18, the sixth signal transmission line 19 and the mid-wave infrared camera 22 are formed, wherein:
[0032] The three-dimensional mobile platform is composed of the first Z-direction platform 1, the first Y-direction platform 2, the X-direction platform 3, the second ...
specific Embodiment approach 2
[0041] Embodiment 2: This embodiment provides a method for using the system described in Embodiment 1 to perform lock-in thermal imaging tomography characterization of micro-defects in integrated circuits. The specific implementation steps of the method are as follows:
[0042] Step (1): Determine the solar cell sample 6 to be measured, place it on the metal sample stage 5, and make the sample clamping device 7 in good contact with the negative electrode of the solar cell sample 6;
[0043] Step (2): Turn on the lock-in thermal imaging tomography system for micro-defects in solar cells. This step includes a computer 10, a data acquisition card 14, a DC power supply 11, a short-wave infrared camera 3, a mid-wave infrared camera 22, and a three-dimensional mobile station. power on;
[0044] Step (3): Connect the positive output line 9 of the DC power supply to the metal sample table 5 (the positive electrode of the solar cell sample 6 is in good contact with the metal sample tab...
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