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103results about How to "Avoid lateral spread" patented technology

One-time sintered super-flat ink-jet penetrating porcelain tiles with three-dimensional decorative effects, and manufacturing method thereof

The invention relates to one-time sintered super-flat ink-jet penetrating porcelain tiles with three-dimensional decorative effects, and a manufacturing method thereof. According to the manufacturing method, a bottom green brick layer, a priming glaze slurry, a semitransparent glaze slurry, and a transparent glaze slurry are prepared respectively; the bottom green brick layer is subjected to following treatment respectively: a priming glaze layer is formed via priming glaze slurry pouring, jet printing of decorative patterns is carried out, a semitransparent glaze layer is formed via semitransparent glaze slurry pouring, and drying is carried out; obtained green bricks are printed with decorative patterns with ink-jet of penetrating ink and jet printing of a permeation promoter, and are allowed to stand for more than 5min; the obtained green bricks are printed with isolation glaze with water isolating performance via silk-screen printing, and are dried and cooled; the green bricks are coated with the transparent glaze slurry via pouring; the green bricks are subjected to one time sintering so as to obtain one-time sintered ink-jet penetrating porcelain tile semi-finished products with three-dimensional decorative effects; the semi-finished products are subjected to polishing via inelastic module technology so as to obtain the one-time sintered super-flat ink-jet penetrating porcelain tiles with three-dimensional decorative effects.
Owner:MONALISA GRP CO LTD

Semiconductor structure for increasing integration density of high-voltage integrated circuit device and manufacturing method

The invention relates to a semiconductor structure for increasing integration density of a high-voltage integrated circuit device and a manufacturing method. Aiming at the problems of large occupation area of PN junction isolation and penetration diffusion adopted in a high-voltage integrated circuit and high step, high electric field, high stress and poor clamping hidden trouble of conventional deep slot isolation, a deep slot diffusion isolation and deep slot penetration diffusion structure is adopted to realize improvement on the integration density of the high-voltage device and promotion on the performance of the device. The method can reduce over 35 percent of high-voltage integrated circuit area at most, improve the integration density of the high-voltage integrated circuit, thin the thickness of an epitaxial layer compared with the common penetration structure, simplify the process design of the high-voltage integrated circuit device structure and effectively solve the high step, high electric field, high stress and poor clamping hidden trouble of the conventional deep slot isolation structure. The method is applied in the fields of structure design and manufacture of high-voltage semiconductor devices and integrated circuits.
Owner:NO 24 RES INST OF CETC

CMOS (complementary metal oxide semiconductor) device capable of reducing charge collection generated by radiation and preparation method thereof

The invention discloses a CMOS (complementary metal oxide semiconductor) device capable of reducing charge collection generated by radiation and a preparation method thereof. The CMOS device provided by the invention is provided with a heavily doped charge restriction collecting region vertically below a source region and a drain region, the doping type of the charge restriction collecting region is opposite to those of the source region and the drain region, and the doping concentration is greater than or equal to those of the source region and the drain source. The transverse range of the charge restriction collecting region is slightly less than or equal to those of the source region and the drain region, and the transverse position of a channel is not more than the edges of the source region and the drain region. The CMOS device provided by the invention can greatly decrease the 'hopper' range generated under the action of independent particles so that the instantaneously collected charge can be decreased under the action of the electric field. As the width of a depletion layer is narrowed, an electron hole in the 'hopper' range is more difficult to diffuse to the edge of the depletion layer, thus the charge collected by a sensitive node can be greatly reduced and the influence of the transient independent particles on the integrated circuit can be effectively restrained.
Owner:PEKING UNIV

Photoresist structure, graphical deposition layer, semiconductor chip, and manufacturing methodd of photoresist structure, graphical deposition layer and semiconductor chip

The embodiment of the invention provides a photoresist structure, a graphical deposition layer, a semiconductor chip, and manufacturing methods of the photoresist structure, the graphical deposition layer and the semiconductor chip. According to the manufacturing method of the photoresist structure, a single photoresist is utilized, the second photoresist layer containing the undercut can be obtained only by using a single developing solution for one-time development, and the size of the undercut can be controlled through the development time, so the problems of stripping difficulty and the like caused by adhesion of a deposition material and the side wall of the photoresist structure in a traditional stripping process are avoided; the first photoresist layer is used as a protective adhesive layer, so that corrosion damage of a developing solution to a substrate material during development can be avoided; and the first photoresist layer is etched, so that the first photoresist layer serving as a protective adhesive layer is converted into a pattern limiting adhesive layer, lateral diffusion at the bottom of a deposition material can be effectively prevented in the material deposition process, and the deposition layer with good morphology is obtained.
Owner:TENCENT TECH (SHENZHEN) CO LTD

Slapper energy change element structure and preparation method thereof

The invention discloses a slapper energy change element structure and a preparation method thereof. The slapper energy change element structure comprises a shear layer, a fly layer, an explosive foil and a substrate, wherein the shear layer, the fly layer, the explosive foil and the substrate are laminated and bonded in sequence from top to bottom; a plurality of conductive through holes are formed in the substrate in a penetrating manner; the hole surfaces of the upper ends of the conductive through holes are in contact with the lower surface of the explosive foil; the hole surfaces of the lower ends of the conductive through holes are flush with the lower surface of the substrate; a shear through hole is formed in the center of the shear layer in a penetrating manner; the upper hole surface of the shear through hole is flush with the upper surface of the shear layer; the lower hole surface of the shear through hole is in contact with the upper surface of the fly layer; and the fly layer is made of a polyimide material. By lamination and bonding of the shear layer, the fly layer, the explosive foil and the substrate in sequence from top to bottom, contact of the molecular layers of the substrate, the explosive foil and the fly layer is realized, and transverse diffusion of plasmas is prevented, so that the energy conversion efficiency is improved.
Owner:INST OF CHEM MATERIAL CHINA ACADEMY OF ENG PHYSICS

Preparation method of static random access memory

The invention provides a preparation method of a static random access memory. According to the preparation method, pre-amorphization ion implantation is performed on a part of a polycrystalline silicon layer before N-type ion implantation is performed, so that the condition that implanted ions longitudinally diffuse, penetrates a gate oxide layer and enters a P well region due to overlarge grain size in the polycrystalline silicon layer in the N-type ion implantation process can be prevented, so that the reduction of the threshold voltage of a subsequently formed pull-down NMOS transistor caused by the above condition can be avoided, and the voltage mismatch can be avoided; meanwhile, the inhibition effect of N-type ion implantation on a polycrystalline depletion effect is improved; and besides, a pull-up PMOS transistor and a pull-down NMOS transistor which are formed subsequently share the same gate structure, so that transverse diffusion of ions in the N-type ion implantation can be inhibited by executing the pre-amorphization ion implantation, the influence of the N-type ion implantation on the threshold voltage of the pull-up PMOS transistor formed subsequently is avoided, and the problem of voltage mismatch is relieved, and device performance can be improved. The same mask is used for two times of ion implantation, and therefore, the preparation cost is low, and the process is simple.
Owner:晶芯成(北京)科技有限公司

Formation method of transistor

A method for forming a transistor, comprising: providing a semiconductor substrate, forming a gate dielectric layer and a gate electrode on the gate dielectric layer on the semiconductor substrate, and the gate electrode includes a first gate electrode on the gate dielectric layer layer and a second gate layer located on the first gate layer, the material of the first gate layer is different from the material of the second gate layer; a part of the width is etched along the sidewall of the first gate layer Openings are formed on both sides of the remaining first gate layer at the bottom of the second gate layer; after the openings are formed, the first ion implantation is performed using the gate electrode as a mask, and on both sides of the gate electrode A lightly doped region is formed in the semiconductor substrate; after the opening is formed, the gate electrode is used as a mask to perform an angled second ion implantation, and a pocket-shaped implanted region is formed in the semiconductor substrate at the bottom of the gate electrode. The pocket-shaped implanted region The doping type of the region is opposite to that of the shallowly doped region. The transistor formed by the method of the invention can better prevent the generation of short channel effect.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Three-dimensional memory and preparation method thereof

PendingCN112820736AImprove storage retention characteristicsAvoid lateral spreadSolid-state devicesSemiconductor devicesGate dielectricPhysics
The invention provides a three-dimensional memory and a preparation method thereof. The method comprises the following steps: forming a laminated structure on a substrate, wherein the laminated structure comprises gate sacrificial layers and gate layers which are alternately laminated; forming a channel hole penetrating through the laminated structure and extending to the substrate, and sequentially forming a barrier layer, a charge capture layer, a tunneling layer and a channel layer on the inner wall of the channel hole to form a channel structure; forming a gate groove penetrating through the laminated structure and extending to the substrate, and forming a gap between the gate groove and the channel structure; sequentially removing the gate sacrificial layer, the part, corresponding to the gate sacrificial layer, of the barrier layer and the part, corresponding to the gate sacrificial layer, of the charge trapping layer through the gate groove to form a sacrificial gap; and filling a dielectric material in the sacrificial gap to form a gate dielectric layer. According to the preparation method, lateral diffusion of the charge trapping layer corresponding to each gate layer can be effectively inhibited, and the storage reliability of the charge trapping layer is improved, so that the storage retention characteristic of the prepared three-dimensional memory is improved.
Owner:YANGTZE MEMORY TECH CO LTD

Manufacturing method of semiconductor device

The invention provides a manufacturing method of a semiconductor device. The method includes the following steps: providing a semiconductor substrate, and forming a gate stacking structure on the surface of the semiconductor substrate; etching the semiconductor substrate by using the gate stacking structure as a mask so as to form grooves in the semiconductor substrate on the two sides of the gatestacking structure; forming buffer diffusion layers surrounding the corresponding grooves on at least one side of the gate stacking structure; and forming a source electrode and a drain electrode inthe grooves. According to the method of the invention, the buffer diffusion layers are formed before forming the source electrode and the drain electrode, diffusion of impurities in the buffer diffusion layers drives diffusion of impurities in the source electrode and drain electrode regions in a subsequent annealing process, and so the distribution of the impurities in the source electrode and the drain electrode regions more uniform, the electric field distribution of PN junctions of the source electrode and the drain electrode regions is reduced, lateral diffusion of the impurities can be avoided, lateral short channel effect is controlled, the junction capacitance and the junction leakage current of the source electrode and the drain electrode regions are reduced, and the yield rate and performance of the semiconductor device are improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1
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