The invention provides a preparation method of a
static random access memory. According to the preparation method, pre-amorphization
ion implantation is performed on a part of a
polycrystalline silicon layer before N-type
ion implantation is performed, so that the condition that implanted ions longitudinally diffuse, penetrates a
gate oxide layer and enters a P well region due to overlarge grain size in the
polycrystalline silicon layer in the N-type
ion implantation process can be prevented, so that the reduction of the
threshold voltage of a subsequently formed pull-down NMOS
transistor caused by the above condition can be avoided, and the
voltage mismatch can be avoided; meanwhile, the inhibition effect of N-type
ion implantation on a polycrystalline depletion effect is improved; and besides, a pull-up PMOS
transistor and a pull-down NMOS
transistor which are formed subsequently share the same gate structure, so that transverse
diffusion of ions in the N-type
ion implantation can be inhibited by executing the pre-amorphization
ion implantation, the influence of the N-type ion implantation on the
threshold voltage of the pull-up PMOS transistor formed subsequently is avoided, and the problem of
voltage mismatch is relieved, and device performance can be improved. The same
mask is used for two times of ion implantation, and therefore, the preparation cost is low, and the process is simple.