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Large stroke pricision working platform device and drive method

A workpiece table and large stroke technology, which is applied to the parts of the instrument, the instrument, the shell, etc., can solve the problems of difficult control and complicated devices, and achieve the effects of fast power transmission, fast response and high rigidity

Inactive Publication Date: 2007-05-02
许宏
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0025] The precision workpiece table device and driving method proposed by the present invention can provide a new solution to many problems such as difficult control and complicated device that occur in the traditional workpiece table device under the current requirements of large stroke, high precision, high frequency response and high rigidity. way

Method used

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  • Large stroke pricision working platform device and drive method
  • Large stroke pricision working platform device and drive method
  • Large stroke pricision working platform device and drive method

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Embodiment Construction

[0064] The key of the present invention is the fine motion mechanism driven by the fluid power drive source. After this part of the problem is solved, the entire workpiece table can truly achieve high-precision positioning, high-speed motion, high-rigidity positioning and high-rigidity motion.

[0065]The structural principle of the fluid power driver referred to in the present invention is shown in Figure 3, and its structure is designed as an internal hollow pressure deformation body 303, and the fluid power of the fluid power drive source 304 is transmitted to the pressure deformation body through the pipeline 305 and the fluid connection head 302 Inside the pressure deformation chamber of 303, under the action of internal pressure, the wall of the pressure deformation body produces a small deformation of expansion and elongation. small displacement. Similarly, when the internal pressure of the pressure deformation chamber decreases, the outer end of the pressure deformatio...

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Abstract

A precise work piece table with large stoke is prepared as connecting fluid-dynamic driving fine mechanism to back of rough moving mechanism through load connection head and rough moving mechanism to load carry platform through said head, using moving guide track of rough moving mechanism and said platform together with fixed guide track to form relative movement pair, fixing position detector and fixed track as well as fine moving mechanism on base, carrying position detector and fixed track as well as fine moving mechanism on base, carrying rough-positioning by rough moving mechanism under control of controller then using fine moving mechanism to carry out fine-positioning till positioning goal is realized.

Description

technical field [0001] The invention belongs to the fields of precision measurement and precision motion control. Specifically, it relates to a large-stroke precision workpiece stage device and a driving method in which a coarse motion mechanism and a fine motion mechanism that controls the deformation of a pressure deformable body through fluid power are connected in series. Background technique [0002] The precision workpiece table provides a precision positioning and Fast-moving loading platform. [0003] The precision workpiece table is mainly composed of a drive source, a feed mechanism, a loading platform and a linear guide rail, a controller and a position detector. As shown in Figure 1, the second page of the book "Precise Workpiece Stage Technology in Micro-Nano Processing" (edited by Liu Junbiao, Xue Hong, and Gu Wenqi, published by Beijing University of Technology Press in 2004) has related technologies in more detail introduct...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B9/10G12B5/00
Inventor 许宏
Owner 许宏
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