Thickness consistency detection device

A detection device and a consistent technology, applied in the field of precision measurement, can solve the problems that linear motion mechanism is not easy to move precisely, prone to average error, cannot achieve high precision, etc., and achieves compact structure, reduced surface error, and reduced vibration. Effect

Active Publication Date: 2018-12-14
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

The disadvantage of this method is that the sensor spot is large, and the average error is prone to occur. The linear motion mechanism is not easy to achieve precise movement in a large range. It can only be applied to industrial-level on-site measurement, and cannot achieve high-precision (<100nm) measurement.
The third is the differential confocal

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  • Thickness consistency detection device

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0025] As shown in Figure 1, it is a schematic diagram of thickness consistency detection, consisting of a workpiece turntable 1, a workpiece table 2, a spectral confocal displacement sensor 3, a sensor adjustment unit 4, a cantilever 5, a counterweight 6, a controller 7, and a cantilever turntable adjustment mechanism 8 , consisting of a cantilever turntable 9;

[0026] Both the workpiece turntable 1 and the cantilever turntable 9 adopt air bearing shafting, which can provide frictionless, low-vibration dynamic motion and good static stability. Servo motors and angle encoders are integrated in the two turntables, which can provide precise rotary motion and Real-time angular displacement signal. The workpiece turntable 1 adopts a hollow structure, which can ensure that when the sample is placed on the workpiece turntable, the upper and lower s...

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Abstract

The invention discloses a thickness consistency detection device. The device comprises a spectrum confocal displacement sensor, a sensor adjusting unit, a work-piece rotary table, a cantilever rotarytable, a cantilever rotary table adjusting unit, a work-piece table, a cantilever, a weight, and a main controller. The device disclosed by the invention can be used for the thickness consistency measurement and analysis of the large-aperture and high-precision material. The device disclosed by the invention is simple, compact and stable in structure, and the engineering is easy to realize; the movement function is executed by using an air-floating revolving shaft system, the vibration in dynamic measurement is greatly reduced, and the quick and precise measurement can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a thickness consistency detection device. Background technique [0002] The rapid development of micro-nano optics and thin-film optics puts forward strict requirements on the thickness consistency of the substrate material. The precise measurement of the thickness consistency of the substrate material is the key to improving its manufacturing process and product quality. [0003] At present, there are mainly three mainstream thickness consistency measurement methods. One is the traditional single-sided positioning measurement method, which makes the measured part fit on the reference reference plane in an appropriate way, and then measures the height of each position relative to the reference plane. Instead of thickness, the disadvantage of this method is that there will be a fitting error between the measured part and the reference surface, and the mea...

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Application Information

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IPC IPC(8): G01B11/06
CPCG01B11/06
Inventor 李杰陈林杨杰乔丽
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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