Vibration isolator with magnetic suspension unit

Abstract

The invention belongs to the field of vibration isolation, and provides a vibration isolator with a magnetic suspension unit. The vibration isolator comprises the magnetic suspension unit for generating negative stiffness, and a mechanical spring damping unit for generating positive stiffness, wherein the two units are connected with each other in series to form a high-stiffness spring system with infinite stiffness in theory. After being connected in series with the conventional mechanical spring, the vibration isolator provided by the invention can achieve high equivalent stiffness of a vibration isolating system, so that the vibration directly acting on precise equipment can be suppressed; and meanwhile, the elastic coefficient of the conventional mechanical spring can be ensured to be small, therefore, the vibration transmitted from the ground to the precise equipment can be isolated, and furthermore, the purposes of isolating the vibration transmitted from the ground to the precise equipment and suppressing the vibration directly acting on the precise equipment can be achieved.

Description

technical field [0001] The invention belongs to the field of vibration isolation, and relates to a vibration isolator including a magnetic levitation unit, which is mainly used to protect ultra-precision processing equipment, measuring instruments, etc. Use performance. Background technique [0002] With the development of ultra-precision machining, ultra-precision measurement, semiconductor lithography, and aerospace technology, the influence of micro-amplitude and ultra-micro-amplitude vibration has become very prominent, especially ultra-precision machining below sub-micron requires an ultra-quiet environment for protection. This type of system requires both the isolation of ground vibrations and the ability to suppress the effects of direct disturbances. The traditional method is to use passive vibration isolation technology to reduce the vibration transmitted from the ground to the precision equipment. The use of vibration isolators to isolate the vibration transmitte...

AI Technical Summary

Problems solved by technology

The use of vibration isolators to isolate the vibration transmitted from the ground to precision equipment usually requires the vibration isolator to have a low vibration isolation stiffness; however, if the vibration isolation stiffness of the vibration isolator is reduced, the vibration isolator cannot suppress the vibration directly acting Vibration on precision equipment, which is the main bottleneck restricting the development of passive vibration isolation systems

In addition, passive vibration isolation technology is not ideal for isolating low-frequency and ultra-low-frequency vibrations, so passive vibration reduction technology cannot be fully applied to ultra-precision occasions dominated by low-frequency and ultra-low-frequency vibrations

Images