Air-floating follow-up device based on electromagnetic force compensation to eliminate the influence of inertial force
A follower device and electromagnetic force technology, applied in inertial force compensation, bearing assembly, non-rotational vibration suppression, etc., can solve problems such as inability to eliminate the influence of inertial force and low control accuracy
Active Publication Date: 2015-07-29
苏州卫优知识产权运营有限公司
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[0004] In order to overcome the deficiencies of existing air flotation follower devices that cannot eliminate the influence of inertial force and have low control precision, the present invention provides an air suspension system based on electromagnetic force compensation that can effectively eliminate the influence of inertial force and have high control precision. floating follower
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[0016] The present invention will be further described below in conjunction with the accompanying drawings.
[0017] refer to figure 1 with figure 2 , an air bearing servo device based on electromagnetic force compensation to eliminate the influence of inertial force, comprising an air bearing shaft 10 and an air bearing sleeve 2, the air bearing sleeve 2 is set on the air bearing shaft 10, and the air bearing sleeve 2, the air bearing sleeve 2 is sealed and connected with the air bearing sleeve 1, the mounting base 8 is installed at both ends of the air bearing shaft 10, the air storage sleeve 1 and the air bearing sleeve 2 constitute The air flotation follower, the air flotation follower moves with the moving part 13 through the hanging rope 12; the air flotation follower that eliminates the influence of inertial force also includes a long-distance linear guide rail 6, and the long-distance linear The guide rails 6 are installed on both sides of the I-beam 17, and the sli...
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An air floatation follow-up device for eliminating the influence of inertial force based on electromagnetic force compensation comprises an air floatation shaft, two air floatation sleeves and long-distance guide track air flotation pulleys, wherein the two air floatation sleeves are sleeved on the air floatation shaft and are hermetically connected with an air storage sleeve; a hanging rope is sleeved on the air storage sleeve; a moving piece is hung on the hanging rope; an acceleration sensor is arranged on the moving piece; an electromagnetic force generating mechanism comprises an electromagnet and a permanent magnet; the electromagnet is arranged in a mounting seat; and the permanent magnet is arranged on the air storage sleeve and directly faces the electromagnet. The air floatation follow-up device effectively eliminates the influence of the inertial force, and control accuracy is high.
Description
technical field [0001] The invention relates to an air-floating follow-up device, in particular to an air-floating follow-up device which eliminates the influence of inertial force. Background technique [0002] The hanging method that adopts at present is that heavy object (moving piece) is directly hung on the slide block on the linear guide rail by hanging rope, and the slide block follows the moving piece. However, in high-precision measurement, the friction between the linear guide rail and the slider will have an additional force on the spatial position and movement of the moving parts. On the other hand, since the moving part is connected to the slider, the slider and other hanging follower parts have mass, and an inertial force will be generated during the movement of the follower part following the moving part, and this inertial force will be added to the moving part superior. [0003] In order to achieve long-distance frictionless movement, the patent application...
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IPC IPC(8): F16C41/00F16F15/22F16F15/03
Inventor 孙建辉单晓杭袁巧玲
Owner 苏州卫优知识产权运营有限公司