Electromagnetic force compensation based air floatation follow-up device without inertia force influence
A follow-up device, electromagnetic force technology, applied in bearing assembly, bearings, bearing components, etc., can solve problems such as low control accuracy and inability to eliminate the influence of inertial force
Active Publication Date: 2015-04-22
苏州卫优知识产权运营有限公司
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Problems solved by technology
[0004] In order to overcome the deficiencies of existing air flotation servo devices that cannot eliminate the influence of inertial force and have low control precision, the present invention provides an air suspension system based on electromagnetic force compensation that can effectively eliminate the influence of inertial force and have high control precision. floating follower
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[0017] The present invention will be further described below in conjunction with the accompanying drawings.
[0018] refer to Figure 1~Figure 3 , an air bearing servo device based on electromagnetic force compensation without inertial force influence, comprising an air bearing shaft 10 and an air bearing sleeve 2, the air bearing sleeve 2 is set on the air bearing shaft 10, and the air bearing sleeve 2, the air bearing sleeve 2 is sealed and connected with the air bearing sleeve 1, the mounting base 8 is installed at both ends of the air bearing shaft 10, the air storage sleeve 1 and the air bearing sleeve 2 constitute The air flotation follower, the air flotation follower moves with the moving part 13 through the lanyard 12; the air flotation follower without the influence of inertial force also includes a long-distance linear guide rail 6, and the long-distance linear The guide rails 6 are installed on both sides of the I-beam 14, and the I-beam 4 is equipped with a slide ...
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The invention discloses an electromagnetic force compensation based air floatation follow-up device without inertia force influence, which comprises an air floatation shaft, two air floatation sleeves and a long-distance guide rail air floatation pulley. The air floatation sleeves are sleeved on the air floatation shaft; the two air floatation sleeves are respectively sealed and connected with an air storage sleeve; a hanging rope is sleeved on the air storage sleeve; a moving part is hung on the hanging rope; an obliquity sensor is arranged on the hanging rope; an electromagnetic force producing mechanism comprises an electromagnet and a permanent magnet; the electromagnet is arranged in a fitting seat; the permanent magnet is arranged on the air storage sleeve; and the permanent magnet is over against the electromagnet. The air floatation follow-up device can effectively eliminate the influence of inertia force and is high in control accuracy.
Description
technical field [0001] The invention relates to an air flotation follower, in particular to an air flotation follower without the influence of inertial force. Background technique [0002] The hanging method that adopts at present is that heavy object (moving piece) is directly hung on the slide block on the linear guide rail by hanging rope, and the slide block follows the moving piece. However, in high-precision measurement, the friction between the linear guide rail and the slider will have an additional force on the spatial position and movement of the moving parts. On the other hand, since the moving part is connected to the slider, the slider and other hanging follower parts have mass, and an inertial force will be generated during the movement of the follower part following the moving part, and this inertial force will be added to the moving part superior. [0003] In order to achieve long-distance frictionless movement, the patent application number CN 201010165536...
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IPC IPC(8): F16C32/06F16C41/00
Inventor 孙建辉袁巧玲单晓杭
Owner 苏州卫优知识产权运营有限公司