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Valve for mostly gas-proof interruption of a flow path

A flow path and valve technology, applied in the field of valves, can solve problems such as complex valve structures, and achieve the effects of fewer valve structures, longer service life, and simple components

Active Publication Date: 2013-01-30
VAT HLDG AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

One disadvantage is that the valve structure is relatively complex and requires a certain axial pressing force to press the sealing part on the valve seat to ensure axial sealing, so the outer disc must be relatively strong by means of a back brace connected to the center of the arm to avoid tilting ground composition

Method used

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  • Valve for mostly gas-proof interruption of a flow path
  • Valve for mostly gas-proof interruption of a flow path
  • Valve for mostly gas-proof interruption of a flow path

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Embodiment Construction

[0052] Figure 1-4D The same embodiment of the inventive valve is shown in different states from different perspectives and with different levels of detail. Therefore, these figures are explained together, and reference numbers and features already explained in previous figures are sometimes not reintroduced here.

[0053] exist Figure 1-4D A possible embodiment of the valve according to the invention in the form of a pendulum valve is shown in A pendulum valve. for substantially hermetic truncation as in the figure 2 The valve in the flow path F represented by the arrow has a valve body 1 with a first opening 3 and an opposite second opening 7 . The two openings 3 and 7 have a circular cross section. in such as Figure 3B , 3C In the closed position C of the valve disc 8 shown in , 4B and 4C, the two openings 3 and 7 are airtightly separated from each other by the valve disc 8, and the two openings 3 and 7 are in the open position O of the valve disc 8 are interconne...

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Abstract

A valve for the gastight interruption of a flow path is disclosed. A valve housing (1) includes a first opening (3) and a valve seat (5). A valve disk (8) includes an outer disk portion (9) and an inner disk portion (11), which is linearly movable relative to an outer disk portion so that, in a closed setting (C), a pressure differential acts substantially upon the movable inner disk portion (11), which is supported on the valve housing (1). The valve seat (5) has a radially inward pointing first inner face (14) and the outer disk portion (9) has a radially outward pointing first outer face (15), wherein in the closed setting (C) there exists a radial sealing contact with the first inner face (14). The outer disk portion has a radially inward pointing second inner face (16) and the inner disk portion has a radially outward pointing second outer face (17), having a radially sealing contact with the second inner face.

Description

technical field [0001] The invention relates to a valve for substantially gas-tight shutoff of a flow path according to the preamble of claim 1 . Such valves, in particular in the form of pendulum valves or slide valves, are used in particular in the field of vacuum technology. Background technique [0002] A valve according to the preamble of claim 1 is disclosed by US 2007 / 0138424 (Gessner), which is considered the closest prior art. [0003] Different embodiments of valves of the above-mentioned type are known from the prior art and are used in particular in vacuum systems in the field of IC processing, semiconductor processing or substrate processing, such processing necessarily taking place in a protective atmosphere with as little as possible polluting particles. Such a vacuum system comprises in particular at least one evacuable vacuum chamber arranged to accommodate semiconductor components or substrates to be processed or manufactured, the vacuum chamber having at...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K3/10F16K3/30F16K27/04F16K51/02
CPCF16K51/02F16K3/10Y10T137/598F16K1/16F16K25/00
Inventor M·兰普雷克特W·维斯
Owner VAT HLDG AG
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