Method and device for repairing broken line of liquid crystal display array substrate

Abstract

The embodiment of the invention discloses a method for repairing a broken line of a liquid crystal display array substrate, at least comprising the following steps of: when the broken line appears on a pattern of the liquid crystal display array substrate, determining a line repairing path of a broken line part of the pattern and scanning the line repairing path; dividing the line repairing path into at least two sections of path intervals according to a scanning result of the line repairing path; setting a corresponding film plating speed for each path of the path interval; and on each section of the path interval, plating a film at the determined corresponding film plating speed, so as to form a communicated plated film on the line repairing path. Meanwhile, the embodiment of the invention provides a device for repairing the broken line of the liquid crystal display array substrate; and according to the embodiment of the invention, the success rate of repairing the line can be improved.

Description

technical field [0001] The invention relates to a thin film transistor liquid crystal display (Thin Film Transistor Liquid Crystal Display, TFT-LCD) manufacturing technology, in particular to a method and a device for repairing disconnection of a liquid crystal display array substrate. Background technique [0002] In the prior art, line open defects often occur in the TFT-LCD array substrate (array) manufacturing process. At this time, it is necessary to make up the disconnected line to reconnect the line. [0003] Such as figure 1 As shown in FIG. 2 , it is a schematic diagram of a disconnection of a pattern circuit on an existing array substrate; figure 1 Only a partial array substrate is shown. Among them, coating is performed on the substrate 1 to form the first pattern 2 and the second pattern 3 . Wherein the second pattern is broken at 40 and 41, thereby breaking the pattern 3 into three parts (30, 31, 32). [0004] Such as figure 2 As shown, a schematic diagra...

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Problems solved by technology

[0005] like image 3 shown, based on figure 2 Schematic diagram of the structure after the supplementary line of the A-A section; from figure 2 It can be seen from the A-A section that the supplementary line device 5 (only a part is shown in the figure) along the figure 2 The supplementary line path moves from left to right at a uniform speed for coating. At the position across the pattern 2, due to the large height change between the pattern 2 and the substrate 1, it is easy to break and discontinuous in the supplementary line path 4. , so that the supplementary line fails, which leads to the unsatisfactory yield of the substrate

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