Method for producing a piezo actuator and piezo actuator

Abstract

The invention describes a method for producing a piezo actuator (100) with a piezo stack (1) and two outer electrodes (2, 3) arranged on the outside of the piezo stack (1). The method according to the invention comprises the following steps: provision of a fully active green stack (1') comprising a plurality of alternately successive green films (4', 5') and continuous inner electrode layers (6, 7) which are provided for the purpose of alternately being electrically connected to two outer electrodes (2, 3) to be arranged on the outside of the piezo stack (1) which is to be produced from the green stack (1') and being electrically insulated from the respective other outer electrode (2, 3); provision of the outside of the fully active green stack (1') with trenches (8, 9) in areas in which the inner electrode layers (6, 7) are intended to be electrically insulated from the corresponding outer electrodes (2, 3), as a result of which the trenches (8, 9) shorten the inner electrode layers (6, 7) in these areas from the outside of the green stack (1') to the inside; filling of the trenches (8, 9) with an electrically insulating slurry (10, 11); further processing of the green stack (1'), the trenches (8, 9) of which are filled with the slurry (10, 11), as a result of which the green films (4', 5') produce piezo electric layers (4, 5) and the green stack (1') produces the piezo stack (1); mounting of the two outer electrodes (2, 3) on the outside of the piezo stack (1), so that the two outer electrodes (2, 3) are alternately electrically connected to the inner electrode layers (6, 7). The method according to the invention is distinguished in that the trenches (8, 9) are filled with the slurry (10, 11) using one of the following methods; screen printing, immersion, spraying or vacuum infiltration.

Description

technical field [0001] The invention relates to a method for producing a piezoelectric actuator and to a piezoelectric actuator. Background technique [0002] A component composed of piezoelectric elements stacked one above the other is referred to as a (piezoelectric) stack. The function of piezoelectric elements is based on the deformation of piezoelectric ceramic materials such as lead zirconate titanate and the action of an electric field. If a voltage is applied to the piezoelectric element, the piezoelectric element expands in a direction perpendicular to the electric field generated by the voltage. Individual piezo elements have a comparatively small adjustment path (stellweg), so for larger adjustment paths a piezo stack consisting of a plurality of alternately successive piezo layers and so-called inner electrode layers is used. [0003] The inner electrode layers are usually alternately electrically connected to outer electrodes arranged on opposite outer faces o...

AI Technical Summary

Problems solved by technology

The disadvantage of this method is that the method is relatively time-consuming and cost-intensive, since the grooves must be produced sequentially by laser

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