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Method of manufacturing product having micro protrusion and recess face structure on surface thereof and manufacturing device thereof

A technology of micro-concave-convex structure and manufacturing method, which is applied in the direction of measuring devices, semiconductor/solid-state device manufacturing, instruments, etc., can solve the problems of reduced productivity, substrate film fracture, and difficult cleaning, and achieve the effect of suppressing the reduction of productivity

Inactive Publication Date: 2013-02-13
MITSUBISHI CHEM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Molds treated with mold release agents often degrade in performance due to repeated transfer of fine concave-convex structures, and the mold becomes unable to be released from the cured resin layer
In the above state, the solidified resin adheres to the surface of the mold, making cleaning difficult, and the substrate film breaks during production, etc.
As a result, manufacturing is interrupted for a long time and productivity is significantly reduced

Method used

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  • Method of manufacturing product having micro protrusion and recess face structure on surface thereof and manufacturing device thereof
  • Method of manufacturing product having micro protrusion and recess face structure on surface thereof and manufacturing device thereof
  • Method of manufacturing product having micro protrusion and recess face structure on surface thereof and manufacturing device thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0296] The infrared spectrum of the mold surface was measured using a Fourier transform infrared spectrometer (manufactured by Thermo Fisher Scientific, Nicolet 380 / Continum). The results are shown in Figure 4 . At 1080~1290cm -1 The observed peak A comes from the release agent, at 730~1080cm -1 The observed peak B is from anodized aluminum. The absorbance area (A) of the peak A was 0.43, and the area ratio ((A) / (B)) of the absorbance of the peak was 0.18, and the first transfer test was performed using the aforementioned mold, and the release property was good.

Embodiment 2

[0298] Following Example 1, 100 transfer tests were carried out to measure the infrared spectrum of the mold surface. As a result, the absorbance area (A) of the peak A was 0.21, and the area ratio ((A) / (B)) of the absorbance of the peak was 0.089, and the first transfer test was performed using the aforementioned mold, and the release property was good.

Embodiment 3

[0300] According to the method same as embodiment 1, measure the infrared spectroscopic spectrum of different mold surfaces that have been made. As a result, the absorbance area (A) of the peak A was 0.35, and the area ratio ((A) / (B)) of the absorbance of the peak was 0.14. In addition, a primary transfer test was performed using the aforementioned mold, and the mold releasability was good.

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Abstract

The present invention relates to a method of manufacturing a product having a micro protrusion and recess face structure, including: when manufacturing a product having micro protrusion and recess face structure on a surface by transferring the micro protrusion and recess face structure on the surface of a roll mold, the surface of which is treated by a demolding agent, to a surface of a film (main body of the product): transferring the micro recess face structure to the surface of the film, measuring the infrared spectrum of the surface of the roll mold just after the film is demolded from the mold, and determining whether the condition of the demolding agent on the roll mold is good or bad based on the infrared spectrum of the surface of the roll mold. The present invention provides a method of manufacturing a product having a micro protrusion and recess face structure which can easily monitor the condition of a demolding agent on a surface of a mold online and can suppress a decline in productivity; and a manufacturing device thereof.

Description

technical field [0001] The invention relates to a method and a device for transferring the micro-concave-convex structure on the surface of a mold whose surface has been treated with a release agent to the surface of an article body, thereby manufacturing an article with a micro-concave-convex structure on the surface. [0002] This application claims priority based on Japanese Patent Application No. 2010-090456 for which it applied in Japan on April 9, 2010, and uses the content here. Background technique [0003] In recent years, it has been found that articles having a surface having a fine uneven structure with a period equal to or less than the wavelength of visible light have antireflection effects, lotus leaf effects, etc., and their usefulness has attracted attention. In particular, a concave-convex structure called a moth-eye structure is an effective anti-reflection means because the refractive index increases continuously from the refractive index of air to the re...

Claims

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Application Information

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IPC IPC(8): B29C33/58B29C33/70B29C59/02H01L21/027B29C33/60
CPCG01N21/3563B29C33/58B29C43/222B29C37/0067B29C59/046
Inventor 小泽觉中井祐介
Owner MITSUBISHI CHEM CORP
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