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Manipulator and substrate transfer device

A technology for substrate handling and manipulators, applied to manipulators, conveyor objects, transportation and packaging, etc., can solve problems such as inability to neutralize static electricity efficiently, and achieve the effect of efficient static removal

Inactive Publication Date: 2013-04-10
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the conventional substrate transfer apparatus, there is a problem that recombination of ions occurs while the ionized gas is conducted through the piping, and static electricity cannot be efficiently neutralized.

Method used

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  • Manipulator and substrate transfer device
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  • Manipulator and substrate transfer device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach ）

[0056] First, use figure 1 A configuration example of a substrate transfer system including the robot arm and the substrate transfer device according to the first embodiment will be described. figure 1 It is a diagram showing a configuration example of a substrate transfer system 1 including the robot 15 and the substrate transfer device 10 according to the first embodiment.

[0057] Also, for ease of understanding, the figure 1 A three-dimensional Cartesian coordinate system including the Z-axis with the positive direction vertically upward is illustrated in . The Cartesian coordinate system is sometimes also shown in other figures used in the following description.

[0058] Such as figure 1 As shown, the substrate transfer system 1 has a substrate transfer device 10 , a controller 20 and a cassette 30 .

[0059] The substrate transfer device 10 is a device that takes out and puts in and transfers the substrates 100 stored in the cassette 30 in multiple layers one by one....

no. 2 approach ）

[0124] Next, use Figure 9A A configuration example of the manipulator 15A according to the second embodiment will be described. Figure 9A It is a figure which shows the structural example of the manipulator 15A which concerns on 2nd Embodiment.

[0125] In addition, since the manipulator 15A according to the second embodiment is mainly different from the manipulator 15 according to the first embodiment in the structure of piping, Figure 9A Only components related to the piping are shown in , and illustration of other components is omitted. In addition, the same reference numerals are assigned to the same components as those of the manipulator 15 according to the first embodiment.

[0126] Such as Figure 9A As shown, the manipulator 15A according to the second embodiment includes a pipe 154A extending from the static eliminator 153 to the outside of the fork 150 , and a discharge hole 155 disposed on the pipe 154A.

[0127] The pipe 154A is exposed to the outside of the...

no. 3 approach ）

[0134] Next, use Figure 9B A configuration example of the manipulator 15B according to the third embodiment will be described. Figure 9B It is a figure which shows the structural example of the manipulator 15B which concerns on 3rd Embodiment.

[0135] In addition, the manipulator 15B according to the third embodiment is mainly different from the manipulator 15A according to the second embodiment in the direction in which the discharge holes are arranged. Figure 9B In FIG. 2 , only components related to the above-mentioned ejection holes are shown, and illustration of other components is omitted. In addition, the same reference numerals are attached to the same components as those of the manipulator 15 according to the first embodiment and the manipulator 15A according to the second embodiment.

[0136] Such as Figure 9B As shown, the manipulator 15B according to the third embodiment includes a pipe 154B extending from the static eliminator 153 to the outside of the for...

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Abstract

The present invention provides a manipulator and a substrate transfer device, which can efficiently remove electricity on a substrate. In order to resolve the problem, the manipulator and the substrate transfer device are configured, the manipulator is provided with a plurality of forks, a static electricity removal apparatus as a generation portion and a spraying hole as a spraying portion. The plurality of forks are used for carrying a substrate, the static electricity removal apparatus is arranged inside the forks to generate an ionic gas, and the spraying hole is used for spraying the ionic gas generated by the static electricity removal apparatus.

Description

technical field [0001] Embodiments disclosed in the present invention relate to a robot arm and a substrate transfer device. Background technique [0002] Conventionally, there is known a substrate transfer device for transferring a substrate such as a glass substrate of a liquid crystal panel and taking it out and putting it into a storage case. [0003] The substrate transfer device includes a robot arm including a plurality of forks, and transfers a substrate by placing it on the forks. Then, the substrate transfer device inserts the fork into a substrate storage box (hereinafter, referred to as “box”) to take out and put in the substrate. [0004] However, when the substrate is transported, taken out and put in, the substrate may be charged with static electricity due to so-called triboelectric charging or peeling charging, and the substrate components may be damaged when the static electricity is discharged. Wait. [0005] Therefore, in recent years, there have been ...

Claims

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Application Information

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IPC IPC(8): B65G49/06B25J15/06
CPCB25J11/0095B25J19/0075H01L21/67742H01L21/68707Y10S414/141
Inventor 原田修钱景华
Owner YASKAWA DENKI KK
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