Treatment method and device for tail gas of silane purifying process

Abstract

The invention discloses a treatment method for tail gas of a silane purifying process. The treatment method comprises the following steps of: 11), passing the tail gas of the silane purifying process through a process pipeline, and conveying the tail gas to a first absorbing device, wherein an alkali absorption liquid with concentration of 20%-45% is filled in the first absorbing device; 12), sufficiently absorbing the tail gas of the silane purifying process by the alkali absorption liquid through the stirring of a stirrer in the first absorbing device; and 13), discharging the resultants obtained by the reaction of the tail gas of the silane purifying process and the alkali absorption liquid. According to the treatment method for the tail gas of the silane purifying process disclosed by the invention, the silane in the process tail gas generated in the silane purifying process is absorbed by the alkali solution, so that the tail gas of the silane purifying process is treated in a safe pollution-free manner; and the safety and environment friendliness of a silane rectification process are improved.

Description

technical field [0001] The invention relates to the technical field of purification and purification of silane, in particular to a method for treating tail gas of a silane purification and purification process, and also relates to a treatment device for the tail gas of a silane purification and purification process for implementing the above method. Background technique [0002] In the purification and purification process of silane, the impurities in silane need to be removed by rectification to obtain pure silane. However, using the purification method of rectification, while removing the impurities in silane, a small amount of silane is also released together with the impurities, forming the waste gas or waste liquid generated during the silane purification process. This part of the silane containing impurities It cannot be recovered, but it cannot be discharged indiscriminately, so certain methods need to be used to treat the tail gas in the silane purification process. ...

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Problems solved by technology

[0003] The tail gas produced in the silane purification process can be directly ignited by burning the tail gas of the process. However, silane gas is a gas with a very wide explosion limit, and the content range that can explode in air is 1%-99% %, that is, silane is flammable or forms an explosive mixture when it encounters air. If it is burned, this part of silane mixed with air will form a safety hazard

[0004] In particular, in the process tail gas purified by silane purification, most of the impurity gases are combustible gases or liquids, and the impurity liquid in the tail gas is not suitable for long-distance transportation. , but the danger in the process is greater, and the silica in the combustion product will also cause environmental pollution

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