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Double-working-mode micro electro mechanical system (MEMS) optical probe

A dual-working mode and optical probe technology, applied in the field of MEMS optical scanning probes, can solve problems such as unfavorable cavity side wall scanning and unfavorable organ tissue scanning, and achieve compact and simple overall structure, low overall production cost, and increased assembly flexibility Effect

Active Publication Date: 2013-04-24
无锡微文半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Considering comprehensively, the two patented probes with different working methods have their own advantages, but both have certain limitations. The side-scanning optical probe is not conducive to the scanning of organs and tissues, and the front-scanning optical probe is not conducive to the scanning of the side wall of the cavity.

Method used

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  • Double-working-mode micro electro mechanical system (MEMS) optical probe
  • Double-working-mode micro electro mechanical system (MEMS) optical probe
  • Double-working-mode micro electro mechanical system (MEMS) optical probe

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Embodiment Construction

[0040] Figure 3-7 As shown, it is a MEMS optical probe with double working mode, including a probe shell 36 with a window seat and a probe main body located in the probe shell 36, the probe main body includes a main body base 35, with a base The MEMS micromirror 32, the first lens assembly 33 and the second lens assembly 34 connected with the optical fiber 37; the MEMS micromirror 32 electrically connected with the external drive circuit is fixed on the front end of the main body base 35; the first The lens assembly 33 is fixed on one side of the main body base 35, and it realizes forward scanning or side forward scanning of the forward or side forward scanning light beam 310 through the lateral deflection of the MEMS micromirror 32; the second lens The component 34 is fixed on the other side of the main body base 35 , and realizes the lateral scanning of the lateral scanning light beam 39 through the lateral deflection of the MEMS micromirror 32 . The first lens assembly an...

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Abstract

The invention discloses a double-working-mode micro electro mechanical system (MEMS) optical probe which comprises a probe tube casing with a window base and a probe main body arranged in the probe tube casing, wherein the probe main body comprises a main body base, an MEMS micromirror with a base, a first lens assembly and a second lens assembly, wherein the first lens assembly and the second lens assembly are connected with optical fibers. The MEMS micromirror electrically connected with an external driving circuit is fixed at the front end of the main body base; the first lens assembly is fixed on one side of the main body base and achieves frontward scanning or lateral frontward scanning of frontward or lateral frontward scanning light beams through crosswise deflection of the MEMS micromirror; and the second lens assembly is fixed on the other side of the main body base and achieves lateral scanning of lateral scanning light beams through crosswise deflection of the MEMS micromirror. The double-working-mode MEMS optical probe performs probe assembling through the double lens assemblies, can achieve two working modes through one MEMS micromirror, can be used for scanning imaging of cavities of multiple organs in human bodies and performing diagnosis and can be used in the field of detection and measuring in industry and the like.

Description

technical field [0001] The invention relates to a MEMS optical scanning probe, in particular to a double-working mode MEMS optical probe; it belongs to the technical field of medical equipment or industrial detection, and in particular relates to a MEMS optical scanning probe. Background technique [0002] Combining microelectromechanical systems (MEMS) scanning micromirrors with Optical Coherence Tomography (OCT) technology to develop endoscopic imaging systems is the main development project of the patent applicant. figure 1 Invention patent ZL201110071103, one of the applicants of the present invention, is a low-cost endoscope micro-optical probe, which uses a MEMS micro-mirror to realize sideways scanning. When used for endoscopic imaging, its side window can be aligned with the sample for optical scanning , especially suitable for the scanning diagnosis of the side wall of the cavity. figure 2 Patent No. 201210363551.5, one of the applicants of the present invention, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B1/05G01N21/954G01N21/88G02B23/24
Inventor 傅霖来谢会开
Owner 无锡微文半导体科技有限公司
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