On-site measuring device and scanning probe automatic centering method based on scanning tunneling effects

Abstract

The invention discloses an on-site measuring device and a scanning probe automatic centering method based on scanning tunneling effects. The on-site measuring device comprises an L-shaped engine seat, an air floatation main shaft, a Z direction horizontal shift shaft, an X direction horizontal shift shaft, a marble support, a two-dimensional precise manual adjusting platform, a Y direction precise servo motor, a probe clamp, a piezoelectric ceramic, a pre-posed signal modulation unit, a scanning probe and a measured workpiece, wherein the air floatation main shaft, the Z direction horizontal shift shaft and the X direction horizontal shift shaft are arranged on the L-shaped engine seat, the measured workpiece is fixed on the air floatation main shaft through a vacuum chuck, a marble machine frame is fixed on the X direction horizontal shift shaft, and the two-dimensional precise manual adjusting platform, the Y direction precise servo motor and the probe clamp are sequentially arranged on the marble machine frame, the piezoelectric ceramic is transversely fixed on the probe clamp, and furthermore the pre-posed signal modulation unit and the scanning probe are sequentially fixed at the tail end of the piezoelectric ceramic. The on-site measuring device and the scanning probe automatic centering method based on the scanning tunneling effects are obtained through on-site measuring structure design and the scanning probe automatic centering method, enable the scanning probe to achieve automatic centering measuring functions during the on-site measuring process, apply the scanning tunneling effects to on-site measuring with innovation, and achieve automatic centering of the scanning probe based on a standard ball.

Description

technical field [0001] The invention relates to the field of ultra-precise on-site measurement of complex curved surfaces, in particular to an on-site measurement device based on scanning tunneling effect and an automatic centering method of a scanning probe. Background technique [0002] Structural elements with complex curved surfaces are widely used in fields such as optical engineering, information communication, aerospace and biomedicine. Due to the special surface properties of the complex curved surface structure, in practical applications, it can meet special requirements, improve and improve the quality of transmission signals, and reduce the volume of the system. Complex surface structures are becoming an important part of modern precision parts. Today, complex curved structures can be produced using ultra-precision machining processes. Due to the small scale of ultra-precision machining workpieces, the machining accuracy is more than one order of magnitude highe...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the secondary clamping error caused by disassembly, measurement and re-clamping of the workpiece in the process of ultra-precision machining, and the shortcomings that the automatic centering of the probe cannot be realized, and to provide an in-situ measuring device based on the scanning tunnel effect and Scanning probe automatic centering method

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