Inspecting device of substrate membrane-forming
A technology for inspecting devices and substrates, applied to measuring devices, optical devices, instruments, etc., can solve problems such as instabilities, skewed horizontal and vertical distances between film formation and the edge of the substrate, and poor display of the substrate
Inactive Publication Date: 2013-06-05
SEMISYSCO CO LTD
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Problems solved by technology
[0010] At this time, in the process of manufacturing the substrate of the LCD or OLED, the plurality of films formed by coating on the surface of the substrate should be aligned according to the coating, and if the alignment is defective, the There is a problem of poor display of the substrate
[0011] That is, when coating and forming a film on the surface of a substrate, the horizontal and vertical distances between the film and the edge portion of the substrate should be constant, but when coating and forming a film on the surface of the substrate, often the applied The horizontal and vertical distances between the film formation and the edge of the substrate are skewed and not constant, and there is no device for checking the skew of this film formation in the past
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[0030] Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0031] figure 1 A side view showing the structure of a substrate film formation inspection device as an embodiment of the present invention, figure 2 A plan view showing the structure of a substrate film formation inspection device as an embodiment of the present invention, image 3 To show a schematic diagram of image information of a substrate on which a film is formed by a camera module as an embodiment of the present invention, Figure 4 as an embodiment of the present invention image 3 The enlarged view of is an enlarged view of the edge portion of the substrate coated with a single-layer film formation, Figure 5 It is a block diagram schematically showing a substrate film formation inspection device as an embodiment of the present invention.
[0032] refer to Figure 1 to Figure 5 , the substrate film formation inspection device provided by the embodiment ...
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Abstract
The present invention discloses an inspecting device of substrate membrane-forming. The invention is composed of a device for inspecting whether the vertical and horizontal distances of film formation coated on the substrate surface and the edge portions are constant. Accordingly, the device can effectively check out undesirable distortion on the surface of the substrate which is difficult to identify by naked eye, while can prevent display defects caused by film formation distortion in the state of completion of the manufacture of LCD or OLED products in a processing chamber.
Description
technical field [0001] The present invention relates to a technique for inspecting whether a film (for example, polyimide) is defective or not, which is applied to a substrate used in an Organic Light Emitting Diode (OLED) or a liquid crystal display (hereinafter referred to as "" Substrate"), especially relates to a substrate film formation inspection device capable of inspecting the deflection of the film formed on the surface of the substrate by measuring the distance between the film formed on the surface of the substrate and the edge of the substrate. Background technique [0002] A thin film transistor liquid crystal display device is generally composed of a lower substrate for forming a thin film transistor, an upper substrate for forming a color filter, and liquid crystal injected between the lower substrate and the upper substrate. The process of manufacturing the liquid crystal display device can be divided into There are three parts: thin film transistor (TFT) pro...
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IPC IPC(8): G01N21/88G01B11/02H01L21/67
CPCH01L22/12G01B11/02G01N21/88G02F1/1309G02F1/1339G01B11/14H10K50/84H10K71/00
Inventor 李淳钟禹奉周朴炳澯
Owner SEMISYSCO CO LTD