Double-faced film-coating method suitable for passive element

A technology of double-sided coating and passive components, applied in sputtering plating, ion implantation plating, vacuum evaporation plating, etc., to achieve the effects of increasing fluency, maintaining consistency, and streamlining the process cycle
CN103160787AInactive Publication Date: 2013-06-19JUANT TECH
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
JUANT TECH
Publication Date
2013-06-19
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention provides a double-faced film-coating method suitable for a passive element, mainly comprising the following steps of: providing a double-faced film-coating device suitable for the passive element; conveying articles to be plated to a first deposition space in a process chamber by a conveying system, and performing a deposition process on a single surface or multiple surfaces of the articles to be plated; and conveying the articles to be plated to a second deposition space in the process chamber by the conveying system, and performing another deposition process on another single surface or other multiple surfaces of the articles to be plated. The method of the invention reduces a complex degree and cost of producing process, and can maintain low pressure consistency in the process chamber. The method of the invention can further increase fluency in a double-faced film-coating process.
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Description

technical field

[0001] The invention relates to a double-sided coating method suitable for passive components. Background technique

[0002] The existing double-sided electrode layer of passive components is formed by screen-printing silver paste on the surface of the passive component body, and then pre-baked at 150 to 200 degrees Celsius. The passive components are sintered at a high temperature of up to 900 degrees Celsius to ensure silver paste adhesion. However, the screen double-sided printing process takes nearly an hour. Compared with the double-sided deposition method, it is not only time-consuming and labor-intensive, but also extremely expensive. It is also a major criticism for the environmental protection problems caused by the high-temperature process. That is, the existing double-sided screen printing process needs to be heated at high temperature for tens of minutes, which not only consumes energy but also causes the ambient temperature to rise. Contents o...

Claims

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