Gas-seal and gas-liquid vibration damping recovery device used in immersion lithographic machine
A recovery device and air sealing technology, applied in the field of flow field sealing and recovery device, can solve the problems of flow field edge instability, liquid leakage, sealing gas entrainment, etc., achieve continuous and stable update, prevent liquid leakage, reduce The effect of fluctuations
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0034] The specific implementation process of the present invention will be described in detail below in conjunction with the drawings and embodiments.
[0035] Such as figure 1 As shown, an air-tight and gas-liquid vibration damping recovery device is installed between the projection objective lens group 1 and the silicon wafer 3 in the immersion lithography machine; the gas-liquid damping recovery device includes a sealing and liquid injection recovery device 2. Porous medium 4; the sealing and liquid injection recovery device 2 consists of the upper end cover 2A of the immersion unit, the intermediate body 2B of the immersion unit, the lower end cover 2C of the immersion unit and the lower end cover accessory 2D of the immersion unit; wherein:
[0036] 1) Upper end cover 2A of the immersion unit:
[0037] Such as Image 6 As shown, there is a central through hole in the upper end cover 2A of the immersion unit, and two symmetrical liquid injection tanks 5A are opened in s...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com