Wireless thermal bubble type accelerometer and preparation method thereof

Abstract

The invention discloses a wireless thermal bubble type accelerometer and preparation method thereof. The wireless thermal bubble type accelerometer comprises a first insulating substrate, a circuit, a first acceleration sensing device and a first support layer. The circuit is formed on the first insulating substrate. The first acceleration sensing device is coupled with the circuit and comprises two first temperature sensing elements and a first heater between the two first temperature sensing elements. The first support layer is attached to the first insulating substrate and supports the two first temperature sensing elements and the first heater.

Description

technical field [0001] The present invention relates to a thermal bubble accelerometer, in particular to a thermal bubble accelerometer with a non-suspended heater and a temperature sensing element. Background technique [0002] US Patent No. 6,182,509 discloses a Thermal Bubble Accelerometer. The hot-bubble accelerometer includes an insulating substrate, a heater and two temperature sensing elements. The thermal insulation base plate has a groove, the heater and the two temperature sensing elements are suspended on the groove, and the two temperature sensing elements are respectively equidistantly placed on opposite sides of the heater. [0003] To form the suspended heater and two temperature sensing elements, a silicon dioxide layer is first formed on an insulating substrate. Then, a polysilicon layer is formed on the silicon dioxide layer. After that, an oxidation process is performed to form another oxide layer on the polysilicon layer. Next, the polysilicon layer i...

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Problems solved by technology

Even so, the silicon substrate still dissipates considerable energy from the heater, resulting in a relatively high energy consumption for such hot-bubble accelerometers

Furthermore, the cavity of the hot-bubble accelerometer is filled with carbon dioxide or air, which will easily cause the heater and temperature sensor to have an oxidation effect, affecting performance and life.

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