Device and method of magnetic levitation molecular pump radical protective bearing detection

A technology for protecting bearings and detecting devices, applied in the direction of mechanical bearing testing, etc., can solve the problems of ineffective rotor protection and effective detection without protected bearings, and achieve the effect of avoiding untimely replacement, avoiding cost increase, and accurate detection results.

Active Publication Date: 2013-07-10
KYKY TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The technical problem to be solved by the present invention is that there is no simple and accurate method for detecting whether the protective bearing in the magnetic levitation molecular pump is effective in the prior art, which may cause th

Method used

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  • Device and method of magnetic levitation molecular pump radical protective bearing detection
  • Device and method of magnetic levitation molecular pump radical protective bearing detection
  • Device and method of magnetic levitation molecular pump radical protective bearing detection

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Embodiment 1

[0043] This embodiment provides a radial protection bearing detection device for a magnetic levitation molecular pump, such as figure 2 and image 3 shown. The detection device includes a simulated rotor 20 made of insulating materials. The simulated rotor 20 is put into a magnetic levitation molecular pump, and when it rotates, it can drive the inner ring 21 of the radial protection bearing to rotate. The inner ring of the radial protection bearing is The inner ring of the first radial protection bearing 4 and the second radial protection bearing 11; the detection device also includes a conductive component 22 connected to the radial protection bearing inner ring 21; the detection device also includes a capacitance meter, The first terminal of the two terminals is connected to the conductive member 22, and the second terminal is connected to the pump body 3; obviously the first terminal of the capacitance meter is connected to the inner ring of the radial protection bearing...

Embodiment 2

[0060] Compared with Embodiment 1, this embodiment differs in that the simulated rotor 20 can only measure the capacitance value between the inner ring and the outer ring of the first radial protection bearing or the second radial protection bearing, so in this embodiment The simulated rotor only needs to open a through hole at one end, such as image 3 shown. One end of the conductive member 22 is connected to the inner ring of the first radial protection bearing or the second inner ring of the radial protection bearing, and the other end is connected to a wire. outside.

[0061] The detection device provided in this embodiment is simpler in structure than the detection device in Embodiment 1, but the detection device in Embodiment 1 can detect two radial directions without disassembling the simulated rotor 20. Protect the capacitance value between the inner ring and the outer ring of the bearing; while the simulated rotor 20 in this embodiment can only measure the capacita...

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Abstract

The invention relates to a device and a method of magnetic levitation molecular pump radical protective bearing detection. The device of the magnetic levitation molecular pump radical protective bearing detection includes an analog rotor which is prepared by insulation materials and loaded into a magnetic levitation molecular pump and capable of driving a radial protective bearing inner ring to revolve, an electric conduction component connected with the radial protective bearing inner ring, and a capacitance meter. The capacitance meter comprises two connecting terminals, wherein a first connecting terminal is connected with the electric conduction component and a second connecting terminal is connected with a pump body. The capacitance meter measures capacitance value between the radial protective bearing inner ring and the pump body. According to the capacitance change situation between the radial protective bearing inner ring and the pump body, the device of the magnetic levitation molecular pump radical protective bearing detection can effectively obtain current information of the protective bearing, prevent the protective bearing from causing terrible accidents. The device of the magnetic levitation molecular pump radical protective bearing detection is high in detection efficiency, low in cost, and capable of effectively avoiding the terrible accidents and relevant economical loss caused by failure of the protective bearing.

Description

technical field [0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a detection device and method for a radial protection bearing of a magnetic levitation molecular pump. Background technique [0002] The magnetic suspension molecular pump is a molecular pump that uses magnetic bearings as the rotor support. It uses magnetic bearings to suspend the rotor stably in the air, so that there is no mechanical contact between the rotor and the stator during high-speed operation, and it has no mechanical wear and energy consumption. Low speed, high allowable speed, low noise, long life, no need for lubrication, etc. At present, the magnetic levitation molecular pump is widely used in the fields of obtaining high vacuum and high cleanliness vacuum environment. [0003] The internal structure of the magnetic levitation molecular pump is as follows: figure 1 As shown, the rotor of the magnetic levitation molecular pump includes a rotor s...

Claims

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Application Information

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IPC IPC(8): G01M13/04
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH
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