Precise length measuring machine and light amount interference removing method and device thereof

A technology of exclusion device and length measuring machine, which is applied to measurement devices, optical devices, optics, etc., can solve the problems of unavoidable interference, increase the workload of operators, and increase the workload of R&D designers, so as to improve the measurement Accuracy and reliability, the effect of increasing operational burden

Active Publication Date: 2013-07-24
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology

But on the one hand, due to the large number of interference areas, there will be position machine differences between different TTP machines, and it is difficult to completely avoid interference after the design of the implemented product; on the other hand, due to the layout design restrictions of some products, As a result, it is difficult to avoid interference during measurement. For example, a 2200mm*2500mm glass substrate can be divided into 18 32-inch small panels and 8 48-inch small panels. Due to the existence of products of different sizes Different layout designs make it impossible for all layouts to avoid the steel frame interf

Method used

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  • Precise length measuring machine and light amount interference removing method and device thereof
  • Precise length measuring machine and light amount interference removing method and device thereof
  • Precise length measuring machine and light amount interference removing method and device thereof

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Embodiment Construction

[0045] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0046] In the field of semiconductor devices, recipes are usually used to represent the set of machine parameters. For TTP length measuring machines, recipes include measurement parameters such as measurement points, brightness, and measurement references during product measurement. Therefore, this paper The set of measurement parameters referred to in usually refers to the recipe. The measurement point refers to the set of coordinate points during measurement. For...

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Abstract

The embodiment of the invention discloses a precise length measuring machine and a light amount interference removing method and a light amount interference removing device thereof. The method comprises the following steps of before measurement, adjusting the reflection input light amount of a current measuring point till that a measured reflection output light amount value is equal to a target reflection output light amount value by the light amount interference removing device to obtain a supplementary correct reflection input light amount value, wherein the target reflection output light amount values of all the measuring points are equal; and/or adjusting the transmission input light amount of the current measuring point till that a measured transmission output light amount value is equal to a target transmission output light amount value to obtain a supplementary correct transmission input light amount value, wherein the target transmission output light amount values of all the measuring points are equal; and saving the obtained supplementary correct reflection input light amount value and/or the obtained supplementary correct transmission input light amount value of the current measuring point in a measuring parameter set by the light amount interference removing device.

Description

technical field [0001] The invention relates to the field of liquid crystal display manufacturing, in particular to a TFT-LCD precision length measuring machine and a method and device for eliminating light interference. Background technique [0002] TTP (Total Pitch) length measuring machine is an important optical measuring device for TFT (Thin Film Transistor Liquid, thin film transistor)-LCD (Liquid Crystal Display, liquid crystal display) process, mainly used to measure the first layer of glass substrate The exposure accuracy of the exposure machine is measured for the pixel pattern, and the measurement results directly determine the exposure alignment of the subsequent image process and the final alignment accuracy of the assembly. At the same time, the device is also commonly used for line width measurement. TTP length measuring machine is also called precision length measuring machine. [0003] The optical measurement of the TTP length measuring machine requires th...

Claims

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Application Information

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IPC IPC(8): G01B11/02G02F1/13
Inventor 黄文德张岳妍朱厚毅
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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