A design method of piezoelectrically driven three-degree-of-freedom torsional vibration mems gyroscope
A torsional vibration and piezoelectric drive technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, speed/acceleration/shock measurement, etc., can solve the problem of oversensitivity to temperature and air pressure changes, sensor output drift and sensitive noise Serious, can not meet the application of aerospace navigation field and other problems
Inactive Publication Date: 2017-02-08
NORTH CHINA UNIVERSITY OF TECHNOLOGY +1
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Problems solved by technology
[0003] The traditional MEMS gyroscope uses the Coriolis force generated by the orthogonal vibration mode of a single harmonic oscillator to be sensitive to the external input angular velocity. There are defects in the design principle such as modal coupling, overly sensitive to temperature and air pressure changes, and the output drift and sensitive noise of the sensor are serious. , can not meet the application in the field of aerospace navigation
[0004] There are many nonlinear dynamic problems in traditional MEMS gyroscopes with electrostatic drive
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[0084] Such as figure 1 Shown o B -X B Y B is the coordinate system fixedly connected with the MEMS gyro foundation, o I -X I Y I is an inertial coordinate system fixed to the earth.
[0085] Assuming an active harmonic oscillator m 1 The torsional vibration angular displacement of θ x , when the gyro revolves around Z I The angular velocity of the shaft rotation is , in orthogonal torsional vibration Under the action of coupling with Ω, the decoupling harmonic oscillator m 2 and the sensitive harmonic oscillator m 3 Y B Coriolis moment of shaft rotation.
[0086] Under the action of the Coriolis moment, the passive harmonic oscillator m 2 and m 3 will wrap around Y B torsional vibration. By detecting the sensitive harmonic oscillator m 3 The capacitance change between the substrate and the MEMS gyroscope can detect the amplitude of the sensitive harmonic oscillator.
[0087] Since the amplitude of the sensitive harmonic oscillator is proportional to the e...
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The traditional MEMS gyro employs a Coriolis force sensitive externally inputted angular velocity generated in an orthogonal vibration mode of separate harmonic oscillator, and the traditional MEMS gyro has a mode coupling and has the design principle defects that the gyro is excessively sensitive to temperature and air pressure change or the like; the output drift of the sensor and the sensitive noise are severe, so the traditional MEMS gyro can not be applied to the field of aviation spaceflight navigation. The invention provides a new design principle of three freedom degrees torsional vibration MEMS angular velocity gyro with two passive harmonic oscillators and single active harmonic oscillator, and provides a system dynamics modeling method, and discloses a basic principle of the design method in improving the traditional MEMS angular velocity gyro design defect. The invention simultaneously realizes the driving of the active harmonic oscillator by a piezoelectric actuation method, thereby avoiding a plurality of non-linear dynamic problems existed in traditional MEMS gyro which employs a static driving, and substantially simplifying the design of MEMS gyro drive circuit.
Description
technical field [0001] The invention relates to a new design method of a MEMS angular velocity gyroscope, in particular to a design method of a three-degree-of-freedom torsional vibration MEMS gyroscope adopting a piezoelectric drive mode. [0002] technical background [0003] The traditional MEMS gyroscope uses the Coriolis force generated by the orthogonal vibration mode of a single harmonic oscillator to be sensitive to the external input angular velocity. There are defects in the design principle such as modal coupling, overly sensitive to temperature and air pressure changes, and the output drift and sensitive noise of the sensor are serious. , can not meet the application in the field of aerospace navigation. [0004] There are many nonlinear dynamic problems in traditional MEMS gyroscopes driven by static electricity. Contents of the invention [0005] The invention adopts a new design principle of a three-degree-of-freedom torsional vibration MEMS angular velocity...
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IPC IPC(8): G01C19/5712
Inventor 何广平狄杰建赵全亮袁俊杰孙恺彭泽
Owner NORTH CHINA UNIVERSITY OF TECHNOLOGY