A virtual measurement method and system for a mixed process

Abstract

The invention discloses a virtual measurement method and system for a mixed manufacturing process. The virtual measurement system for the mixed manufacturing process comprises a production drilling crew, an APC (advance process control) system, an error detecting and classifying system, a data collection engine and processing system and a quality tester, wherein the production drilling crew processes a product to be processed under the control of the APC system; the error detecting and classifying system monitors the whole processing process of the production drilling crew and records the data of all process variables; the quality tester carries out sampling inspection to the quality of the processed product; the data collection engine and processing system collects the data of the whole production process via a data line coupled to the error detecting and classifying system and the quality tester; data processing and the parameter identification of a virtual measurement model are carried out; and the qualities of unsampled products of various specifications are predicted. According to the virtual measurement model built by the invention, the product quality of the whole processing process can be evaluated by the established virtual measurement model, quality prediction of the products of small amount and various types is realized, and the prediction precision of the quality of products of small amount is improved.

Description

technical field [0001] The invention relates to a virtual measurement method and system for a mixed product processing process, which is suitable for product quality control in batch production processes (such as semiconductor wafer processing, TFT-LCD panel production, etc.), and belongs to the field of process control. Background technique [0002] At present, the batch production process of products such as semiconductor wafers and liquid crystal panels has developed from a single-product production model to a multi-product collinear production model, that is, there are many types of product specifications that are produced online at the same time, and due to Expensive production machines drive engineers to maximize the utilization time of production machines and minimize the idle time of machines. Therefore, products of the same specification may be produced on different production machines, and the same production machine will produce various production machines. This p...

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Problems solved by technology

[0005] Patent No. CN201010262348.X discloses a virtual measurement method and system for a batch process. This method finds the key variables affecting the quality of semiconductor wafers through the statistical method of successive regression, establishes a linear model, and predicts the quality of wafers to be processed. However, This method does not consider the benefit factor of the product, it is only suitable for the quality control of a single product, and cannot be applied to the mixed process

[0006] Patent No. CN200610108408.6 discloses a method for establishing a virtual measurement prediction model for semiconductor manufacturing. This method establishes multiple prediction models and uses performance indicators to select the best model to improve prediction accuracy. When the relevant indicators of are all lower than the given threshold, the system will have no output value, and there is no prediction related to the quality of multiple products in the mixed process

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