Substrate transfer mechanism and substrate transfer system having same
A technology of transmission mechanism and transmission system, which is applied in the direction of conveyor objects, transportation and packaging, lighting and heating equipment, etc., can solve the problems of low transmission efficiency, high maintenance cost, and increased cost, and achieve high transmission efficiency, control and The effect of simple operation and low cost
Active Publication Date: 2016-08-31
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
[0003] In the traditional substrate transfer system, since the robotic arm needs to have multi-axis motion functions such as rotation, telescopic and lifting, it is expensive, the control is complicated, the maintenance cost is high, and the operation requires certain skills
In addition, the cassette rotation and lifting device and the tray rotation and lifting device are required to cooperate with the mechanical arm, so the structure of the system is complicated and the control is complicated, which further increases the cost
In addition, there is also the problem of low transmission efficiency
Method used
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[0025] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0026] In describing the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom" etc. indicate an orientation or The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specif...
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The invention discloses a substrate transmission mechanism which comprises a substrate transmission mechanism body, and is characterized by comprising a liner motion unit, a rotary motion unit and a main arm, wherein the linear motion unit is connected with the rotary motion unit through the main arm and used for driving the rotary motion unit to move linearly; and the rotary motion unit is used for capturing or loosening a substrate rotationally. According to the substrate transmission mechanism, the structure is simple, the operation is convenient, and the efficiency is high; and devices such as a universal type mechanical arm and the like in a conventional substrate transmission mechanism can be omitted, and the cost is low. The invention further discloses a substrate transmission system provided with the substrate transmission mechanism.
Description
technical field [0001] The invention relates to the technical field of semiconductor technology, in particular to a substrate transport mechanism and a substrate transport system with the substrate transport mechanism. Background technique [0002] In industries such as semiconductors and LEDs, automatic loading and unloading devices that can automatically load and unload substrates are usually used. Through the automatic loading and unloading device, the substrates to be processed can be placed on the workstation, and the substrates can be recovered after the processing is completed. Traditionally, high-performance robotic arms and supporting automation devices are used to complete the loading and unloading of substrates. The robotic arms can complete rotation, telescopic and lifting actions. In addition, in order to position the film loading and unloading stations, the automatic film loading and unloading device usually needs to have other devices that can be matched with...
Claims
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IPC IPC(8): B65G47/90B65G47/91B65G49/06B65G49/07
Inventor 周卫国
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD