Cone angle measuring device and method for axicons

The technology of a detection device and detection method is applied in the field of optical detection to achieve the effects of easy detection operation and simple structure of the device

Active Publication Date: 2013-09-11
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is not valid for the measurement of large angle axicon

Method used

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  • Cone angle measuring device and method for axicons
  • Cone angle measuring device and method for axicons
  • Cone angle measuring device and method for axicons

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] figure 2 The optical path diagram of measuring the convex axicon for the axicon cone angle detection device of the present invention, as can be seen from the figure, the axicon 3 to be measured in embodiment 1 of the present invention is a convex axicon, and the step of measuring the cone angle of the convex axicon as follows:

[0036] ① An axicon lens 3 to be measured is placed between the beam expander lens group 2 and the focusing lens 4 in the direction of the beam output of the laser 1, and the plane of the axicon lens 3 to be measured faces the light output direction of the laser 1;

[0037] ②Adjust the optical path: adjust the central axis of the beam expander group 2 to coincide with the central axis of the outgoing beam of the laser 1; adjust the plane of the axicon 3 to be measured to be perpendicular to the outgoing beam of the laser 1 , while ensuring that the central axis of the axicon 3 to be measured coincides with the central axis of the laser 1 outgoi...

Embodiment 2

[0050] Figure 4 It is the optical path diagram of the concave axicon that is measured by the axicon cone angle detection device of the present invention. As can be seen from the figure, the axicon 3 to be measured in Embodiment 2 of the present invention is a concave axicon, and the step of measuring the cone angle of the concave axicon as follows:

[0051] ① An axicon lens 3 to be measured is placed between the beam expander lens group 2 and the focusing lens 4 in the direction of the beam output of the laser 1, and the plane of the axicon lens 3 to be measured faces the light output direction of the laser 1;

[0052] ②Adjust the optical path: adjust the central axis of the beam expander group 2 to coincide with the central axis of the outgoing beam of the laser 1; adjust the plane of the axicon 3 to be measured to be perpendicular to the outgoing beam of the laser 1 , while ensuring that the central axis of the axicon 3 to be measured coincides with the central axis of the...

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Abstract

Disclosed are a cone angle measuring device and method for axicons. The cone angle measuring device comprises a laser, a bean expander set, a focusing lens and an image sensor, wherein the beam expander set, the focusing lens and the image sensor are sequentially arranged along exit beams of the laser, and an insert hole for an axicon to be detected is arranged between the beam expander set and the focusing lens. The cone angle measuring device has the advantages of simple structure, easy measurement of any cone angles of the axicon and the like.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a detection device and a detection method for the cone angle of an axicon mirror. technical background [0002] As a rotationally symmetrical pyramid optical element, the axicon lens can provide a long focal depth for the optical system. Due to this advantage, it is widely used in many fields, such as laser beam shaping, laser drilling technology, optical inspection, Laser resonators, generation of non-diffraction beams, etc., and the use of axicon mirrors in lithography illumination systems can achieve ring illumination modes. This puts forward strict requirements on the manufacturing accuracy of the tapered surface, and the measurement of the cone angle of the axicon mirror needs an accurate method to realize. [0003] Prior art [1] (M.de Angelis, S.De Nicola, P.Ferraro, et al. "Test of a conical lens using a two-beam shearing interferometer", Opt Laser Eng.39:155-163(2003 )....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
Inventor 袁乔曾爱军张善华黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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