Axicon mirror cone angle detection device and detection method

A detection device and axicon lens technology, applied in the field of optical detection, to achieve the effects of easy detection operation, accurate results, and simple device structure

Active Publication Date: 2016-11-30
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

This method is not valid for the measurement of large angle axicon

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  • Axicon mirror cone angle detection device and detection method
  • Axicon mirror cone angle detection device and detection method
  • Axicon mirror cone angle detection device and detection method

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the accompanying drawings and implementation examples, but the protection scope of the present invention should not be limited thereby.

[0029] see first figure 1 and figure 2 , figure 1 and figure 2 It is a schematic diagram of the axicon cone angle detection device of the present invention. As can be seen from the figure, the axicon cone angle detection device of the present invention is composed of a collimator 1, a focusing lens 3 and an image sensor 4. image sensor4. An optical wedge or the socket of the axicon to be measured is placed between the collimator 1 and the focusing lens 3 .

[0030] Using the above-mentioned axicon cone angle detection device to detect the axicon cone angle, the detection method comprises the following steps:

[0031] ①In the socket of the axicon to be tested between the collimator 1 and the focusing lens 3, insert the optical wedge 2 with the same proces...

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Abstract

An axicon cone angle detection device and a detection method thereof, the device is composed of a collimator, a focusing lens and an image sensor, and its positional relationship is: along the direction of the outgoing light beam of the collimator, the focusing lens is sequentially and the image sensor, the socket of the axicon to be measured is set between the collimator and the focusing lens. The device has the advantages of simple structure, easy realization of the measurement of the axicon at any angle, and the ability to measure the cone angles at different positions of the axicon and the like.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to an axicon cone angle detection device and a detection method thereof. technical background [0002] The axicon is a rotationally symmetrical pyramidal optical element whose focal line is along the optical axis. Because it can provide a long focal depth for the optical system, it is used in laser beam shaping, laser drilling technology, optical detection, laser resonators, Aspects such as the generation of non-diffraction beams are widely used, and the use of axicon mirrors in lithography illumination systems can achieve ring illumination patterns. This puts forward strict requirements on the manufacturing accuracy of the tapered surface, and the measurement of the cone angle of the axicon mirror needs an accurate method to realize. [0003] Prior Art [1] (M.de Angelis, S.De Nicola, P.Ferraro, et al. "Test of a conical lensusing a two-beam shearing interferometer", Opt Laser Eng....

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26
Inventor 王莹曾爱军袁乔黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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