Axial cone mirror cone angle detection device and method

A detection device and detection method technology are applied in the field of optical detection to achieve the effects of accurate results, easy detection and operation, and simple device structure.

Active Publication Date: 2014-06-25
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

This method is not valid for the measurement of large angle axicon

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  • Axial cone mirror cone angle detection device and method
  • Axial cone mirror cone angle detection device and method
  • Axial cone mirror cone angle detection device and method

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the accompanying drawings and implementation examples, but the protection scope of the present invention should not be limited thereby.

[0029] see first figure 1 with figure 2 , figure 1 with figure 2 It is a schematic diagram of the axicon cone angle detection device of the present invention. As can be seen from the figure, the axicon cone angle detection device of the present invention is composed of a collimator 1, a focusing lens 3 and an image sensor 4. image sensor4. An optical wedge or the socket of the axicon to be measured is placed between the collimator 1 and the focusing lens 3 .

[0030] Using the above-mentioned axicon cone angle detection device to detect the axicon cone angle, the detection method comprises the following steps:

[0031] ①In the socket of the axicon to be tested between the collimator 1 and the focusing lens 3, insert the optical wedge 2 with the same proc...

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Abstract

The invention discloses an axial cone mirror cone angle detection device and method. The device is composed of a collimator, a focusing lens and an image sensor. According to the position relation of the collimator, the focusing lens and the image sensor, the focusing lens and the image sensor are sequentially arranged in the outgoing beam direction of the collimator, and an insertion opening of an axial cone mirror to be detected is arranged between the collimator and the focusing lens. The axial cone mirror cone angle detection device has the advantages that the structure is simple, measuring of the axial cone mirror at any angle can be easily achieved, and cone angles of the axial cone mirror at different positions can also be measured.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to an axicon cone angle detection device and a detection method thereof. technical background [0002] The axicon is a rotationally symmetrical pyramidal optical element whose focal line is along the optical axis. Because it can provide a long focal depth for the optical system, it is used in laser beam shaping, laser drilling technology, optical detection, laser resonators, Aspects such as the generation of non-diffraction beams are widely used, and the use of axicon mirrors in lithography illumination systems can achieve ring illumination patterns. This puts forward strict requirements on the manufacturing accuracy of the tapered surface, and the measurement of the cone angle of the axicon mirror needs an accurate method to realize. [0003] Prior art [1] (M.de Angelis, S.De Nicola, P.Ferraro, et al. "Test of a conical lens using a two-beam shearing interferometer", Opt Laser Eng...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
Inventor 王莹曾爱军袁乔黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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