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Cone mirror cone angle measuring device and measuring method

A measuring device and conical mirror technology, which is applied in the field of optical detection, can solve the problems that real-time measurement cannot be realized, and achieve the effects of convenient calculation, easy detection operation, and simple device structure

Active Publication Date: 2017-04-05
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Although this device can realize the measurement of any angle conical mirror, it needs to make an optical wedge before measuring the cone angle, which cannot realize real-time measurement

Method used

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  • Cone mirror cone angle measuring device and measuring method
  • Cone mirror cone angle measuring device and measuring method
  • Cone mirror cone angle measuring device and measuring method

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with the accompanying drawings and implementation examples, but the protection scope of the present invention should not be limited thereby.

[0023] see first figure 1 , figure 1 It is the principle diagram of the conical mirror cone angle measuring device of the present invention. As can be seen from the figure, the conical mirror cone angle measuring device of the present invention is composed of a light source 1, a focusing lens 2, a light filter aperture 3, a beam splitter 5, a collimating lens 6, a reflecting mirror 9, an image sensor 4, a first adjustment The mechanism 8 is composed of the second adjustment mechanism 10 with a high-precision angular displacement stage, and its positional relationship is: along the direction of the light beam emitted by the light source 1 are the focusing lens 2, the filter aperture 3, the beam splitter 5, the collimating lens 6 and the reflector Mirror 9; desc...

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Abstract

The invention relates to a measuring device and a measuring method for a taper angle of a tapered lens. The measuring device for the taper angle of the tapered lens is composed of a light source, a focusing lens, a light-filtering hole, a light splitter, a collimating lens, a reflecting mirror, an image sensor, a first adjusting mechanism and a second adjusting mechanism with a high-precision angular displacement table. The measuring device for the taper angle of the tapered lens has the advantages of simple structure, convenience in operation, capability of realizing a taper angle measurement for the tapered lens without using a standard lens, and the like.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a conical mirror cone angle measuring device and a measuring method. [0002] technical background [0003] As a rotationally symmetrical pyramid optical element, the conical mirror can provide a long focal depth for the optical system, which makes it widely used in laser beam shaping, laser drilling, optical inspection, laser resonator, non-diffraction beam In terms of the production and other aspects, especially in the lithography illumination system, the circular illumination mode can be realized by using the conical mirror. The high-precision and wide-range detection of the cone angle of the cone mirror has always been concerned. [0004] Prior art [1] (M.de Angelis, S.De Nicola, P.Ferraro, et al. "Test of aconical lens using a two-beam shearing interferometer", Opt Laser Eng.39:155-163(2003) .) Using two-beam light shearing interference technology to detect the angle formed...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26
Inventor 王莹曾爱军张运波顾帅妍黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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