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Method and device for separating disk-shaped elements which adhere to each other

A component, disc-shaped technology, applied in the field of separating two disc-shaped components attached to each other, can solve problems such as process interruption

Inactive Publication Date: 2013-09-11
AMB APP MASCHENBAU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this process results in a considerable interruption of the process

Method used

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  • Method and device for separating disk-shaped elements which adhere to each other
  • Method and device for separating disk-shaped elements which adhere to each other
  • Method and device for separating disk-shaped elements which adhere to each other

Examples

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Embodiment Construction

[0019] figure 1 A two-stage subsequent separation apparatus is shown. Refer below figure 1 Elements explained for detecting wafers attached to each other and for controlling the drive mechanism are also presented in figure 2 and image 3 in the device. However, to keep the drawings simple, full representations have not been repeated.

[0020] The device for separating mutually adhering disc-like elements comprises a first transfer device 1 . The first conveyor device 1 is preferably embodied as a conveyor belt. The conveyor belt provides a belt 2 which is formed in a loop and runs over a first drive roller 3 and a second drive roller 4 . A drive mechanism 5 acting on at least the first drive roller 3 or the second drive roller 4 is provided for driving the conveyor belt. The drive mechanism 5 can be adjusted with respect to the transport speed of the belt 2 .

[0021] On its outwardly facing side, the belt 2 forms a conveying plane 6 . The side of the belt 2 facing a...

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PUM

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Abstract

The invention relates to a method and a device for separating disk-shaped elements, which adhere to each other, during transport. The adhering disk-shaped elements (30) are transported, wherein a first retaining force is generated by a suction device (7, 8) for the transport of at least a first of the adhering disk-shaped elements (9, 10) on a surface. The adhering disk-shaped elements (9, 10) are identified and a second retaining force (32) is generated by negative pressure on at least a second disk-shaped element (10) that adheres to the first element (9). A relative movement (33) of the disk-shaped elements (9, 10) retained by the first and the second retaining forces is produced in the direction of transport and the disk-shaped elements (9, 10) are conveyed away in the direction of transport.

Description

technical field [0001] The present application relates to a method and a corresponding device for separating two disc-shaped elements attached to each other. Background technique [0002] When separating disc-shaped elements such as wafers from the stack, the actual separation process may sometimes be performed in an incomplete manner. In this case, two more or less overlapping disc-shaped elements are attached to each other. Subsequent separations then need to be performed in order to avoid disturbing further manufacturing processes, for example when manufacturing photovoltaic cells. Hitherto, disc-shaped elements adhered to each other in this way had to be discharged from the process and subsequently separated individually before being recycled. However, such a procedure leads to a rather long interruption of the process. Contents of the invention [0003] The aim is then to provide the simplest and as efficient as possible subsequent separation for separating the dis...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00H01L21/683B65G59/12
CPCH01L21/67092B65G59/12H01L21/6838
Inventor 于尔根·阿克曼波利斯·马茨纳阿明·塞特斯
Owner AMB APP MASCHENBAU
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