Rotary Mechanism for Reflectivity Measurement of Soft X-ray-EUV Multilayer Film Components
An X-ray and extreme ultraviolet technology, applied in the field of space optics, can solve the problems of high production cost, high difficulty in use and maintenance, and complicated mechanism, and achieve the effect of convenient and fast use and maintenance, low price and small size
Active Publication Date: 2015-08-19
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
[0003] In the prior art, synchrotron radiation is often used as the light source for the reflectivity measurement of soft X-ray-EUV multilayer film elements, which is usually installed on the soft X-ray measurement beamline, and the internal rotating mechanism mostly adopts a vacuum worm gear pair structure, which is difficult to install and debug Large, need to install a vacuum motor, supporting vacuum electronics control system, complex mechanism, expensive production cost, high difficulty in use and maintenance, so the number of this kind of equipment is very small, and it cannot meet the needs of many non-synchronous radiation laboratories for optical research in this waveband need
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[0011] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0012] Such as figure 1 As shown, the rotating mechanism used for soft X-ray-EUV multilayer film element reflectivity measurement includes detector driving gear 1, detector driven gear 2, optical element sample holder 3, sample holder driven gear 4, sample Frame driving gear 5, photoelectric conversion detector 6, sample rack gear driving rod 7, detector gear driving rod 8, vacuum chamber 9, light entrance connecting flange 10, sample rack driving gear supporting shaft 11, driven gear supporting shaft 12. The detector driving gear supports the shaft 13 and two connecting frames 14.
[0013] The detector gear driving rod 8 is connected with the detector driving gear 1 through the connecting frame 14 . The detector driving gear support shaft 13 is welded and fixed on the bottom plate 9-1 of the vacuum chamber 9, and the detector driving gear 1 is connected wi...
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A rotation mechanism for measuring reflectivity of soft X-ray-extreme ultraviolet multilayer-film elements belongs to the technical field of space optics. To solve the problems in the prior art, a driving gear supporting shaft and a driven gear supporting shaft of a sample holder of the mechanism, and a driving gear supporting shaft of a detector are fixed in a vacuum chamber. A gear drive rod of the detector is connected with a driving gear of the detector through a connection rack. The driving gear of the detector is connected with the driving gear supporting shaft of the detector. A driven gear of the detector is connected with the upper part of the driven gear supporting shaft and engages with the driving gear of the detector. A photovoltaic conversion detector is fixed on the driven gear of the detector. A gear drive rod of the sample holder is connected with a driving gear of the sample holder through a connection rack. The driving gear of the sample holder is connected with the driving gear supporting shaft of the sample holder and engages with a driven gear of the sample holder. The driven gear of the sample holder is connected with the lower part of the driven gear supporting shaft. An optical element sample holder is fixed on the driven gear of the sample holder. A light inlet connecting flange is arranged at one end of the vacuum chamber.
Description
technical field [0001] The invention relates to a rotating mechanism for measuring the reflectivity of a soft X-ray-extreme ultraviolet multilayer film optical element, which is used for the reflectivity measurement of the multilayer film of the optical element, and belongs to the field of space optics technology. Background technique [0002] With the development of space optics technology, the optical system of soft X-ray-extreme ultraviolet band in shortwave optics is more and more widely used in space detection. In order to improve the reflectivity of the optical components in the optical system of this wavelength band to the target light in the space environment and suppress the reflectivity of the non-target light, it is necessary to coat the optical components with a multilayer film. Due to the very short wavelength of soft X-ray-extreme ultraviolet rays, higher coating control precision is required, high requirements for substrate and film roughness and other technic...
Claims
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IPC IPC(8): G01N21/55
Inventor 刘世界陈波
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI