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Vacuum evaporation apparatus and method for replacing crucibles in vacuum evaporation apparatus

An evaporation device and evaporation technology, which can be used in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of large-scale device and time-consuming, and achieve the simplification of replacement operation, prevention of condensation and adhesion, and reduction of Effects of Corrosion and Deterioration

Active Publication Date: 2013-10-23
HITACHI ZOSEN CORP
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  • Summary
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  • Claims
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AI Technical Summary

Problems solved by technology

[0006] However, a vacuum container for replacement and an air cylinder device for raising and lowering the crucible are required for the two evaporators, resulting in an increase in the overall size of the device.
In addition, since the crucible is replaced in the vacuum container, it takes time to replace and evacuate the crucible.

Method used

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  • Vacuum evaporation apparatus and method for replacing crucibles in vacuum evaporation apparatus
  • Vacuum evaporation apparatus and method for replacing crucibles in vacuum evaporation apparatus
  • Vacuum evaporation apparatus and method for replacing crucibles in vacuum evaporation apparatus

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Embodiment Construction

[0024] The following is based on Figure 1 to Figure 8 , an embodiment of the vacuum evaporation device and the crucible replacement method of the vacuum evaporation device of the present invention will be described.

[0025] (Structure of Vacuum Evaporation Device)

[0026] Such as figure 1 As shown, the above-mentioned vacuum evaporation device includes: a vacuum evaporation container 10 forming an evaporation chamber 11; first and second evaporation devices 13A and 13B having first and second crucibles 12A and 12B; first and second Delivery pipes 14A, 14B are respectively connected to the above-mentioned first and second evaporation devices 13A and 13B in a separable manner; a confluence pipe (manifold) 16 connects the vapor deposition materials from the first and second delivery pipes 14A and 14B sent to the vapor deposition nozzle 15; and the first and second continuous vapor deposition operation parts 17A and 17B are provided in the first and second delivery pipes 14A ...

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Abstract

The invention provides a vacuum evaporation apparatus and a method for replacing crucibles in a vacuum evaporation apparatus. When a second crucible (12B) is replaced, a second brake valve (35B) is used to close a second delivery pipe (14B), and a crucible accommodating member (31B) of a second evaporation device (13B) is taken down from the second delivery pipe (14B), so that the second crucible (12B) is replaced. At this time, air flows into the second evaporation device (13B) and the second delivery pipe (14B). However, after the crucible accommodating member (31B) is mounted on the second delivery pipe (14B), a second deaeration valve (33B) is opened to perform deaerating to realize specified vacuum conditions, so that when the second brake valve (35B) is opened and evaporation is started, air does not enter into a vacuum evaporation container (10), deaeration for the vacuum evaporation container (10) is not needed as air enters. Thus, first and second evaporation devices (13A, 13B) can be simple in structure, and replacement of first and second crucibles (12A, 12B) can be carried out in the air, thereby improving operability.

Description

technical field [0001] The present invention relates to a vacuum evaporation device and a crucible replacement method of the vacuum evaporation device, capable of continuously evaporating an evaporation material on an evaporation object in a vacuum container for a long time. Background technique [0002] If the crucible containing the vapor deposition material in the vacuum vapor deposition apparatus is used for heating the vapor deposition material for a long time, it will deteriorate. Therefore, the capacity is determined according to the vapor deposition (heating) time, and in order to perform continuous vapor deposition for a long time, it is necessary to replace a used crucible with less vapor deposition material with a new crucible containing new vapor deposition material. [0003] The vapor deposition device is equipped with vapor deposition objects such as substrates and a crucible in the vacuum container. In the above vapor deposition device, when the crucible is re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/26C23C14/56
Inventor 藤本英志松本祐司大工博之
Owner HITACHI ZOSEN CORP
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