Spatial Error Calculation Method for Precision Inspection Platform of Large Aperture Optical Components
A technology of optical components and detection platforms, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of difficult direct measurement of spatial errors and measurement accuracy, and achieve the effect of calculating spatial errors
Inactive Publication Date: 2016-04-06
XIAMEN UNIV
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[0004] The purpose of the present invention is to provide a space error calculation method for a precision detection platform for large-diameter optical components in view of the difficulty of directly measuring the space error of the precision detection platform for large-diameter optical components and the requirements for measurement accuracy
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[0021] The technical solution of the present invention will be further elaborated below in conjunction with the accompanying drawings.
[0022] Such as figure 1 The large-aperture optical element precision testing platform shown is provided with a beam 1 , a probe control system 2 , a probe 3 , a workbench 4 and a base 5 . Driven by a linear motor, the maximum stroke of the X and Y axes is 400mm, and the maximum stroke of the Z axis is 150mm. During the detection process, the workbench 4 is responsible for placing and fixing the optical component to be tested, and the probe 3 completes the surface measurement of the optical component to be tested, and completes the planned detection trajectory through the linkage of various axes. The invention mainly performs quantitative measurement and calculation on the spatial error of the platform during operation.
[0023] In order to illustrate the specific steps of the present invention better, in conjunction with Figure 6 and 7 ,...
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The invention provides a space error calculation method for a large-aperture optical element precision detection platform and relates to optical element detection. The space error calculation method includes the steps that space errors are resolved into the errors in the X-Y plane and the errors caused by the Z axis after the X-Y plane move along the Z axis, values of the errors of the two parts are used comprehensively, and space error values are calculated through the methods that polynomial fitting is performed on the linkage errors of the X axis and the Y axis and the positioning errors of the Z axis respectively, vertical projection to a ZO1X plane and vertical projection to a ZO1Y plane are performed on the actual motion trail of the Z axis respectively and a plurality of related right triangles are resolved. Due to the fact that all the applied error values can be measured through existing equipment, the space error calculation of the large-aperture optical element precision detection platform is achieved.
Description
technical field [0001] The invention relates to optical element detection, and relates to a space error calculation method for a large-diameter optical element precision detection platform. Background technique [0002] Large-aperture high-precision optical components, especially aspheric components, have been widely used in aerospace, astronomy and inertial confinement fusion (ICF) giant laser devices. It has very high requirements (see literature: Cheung CF, Lee WB. Atheoretical and experimental investigation of surface roughness formation in ultra-precision diamond turning [J]. International Journal of Machine Tools & Manufacture, 2000, 40: 979-1002). At present, in the field of large-caliber high-precision optical component inspection, especially in the rough grinding and fine grinding forming stages, the three-coordinate inspection platform is widely used and plays an important role. In order to make the detection results can accurately guide the compensation processin...
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IPC IPC(8): G01B11/00
Inventor 郭隐彪张东旭杨平杨炜王詹帅
Owner XIAMEN UNIV