Cable table for workpiece table of lithography machine

Abstract

The invention discloses a cable table for a workpiece table of a lithography machine. The cable table is mainly applied to a semiconductor lithography machine. The cable table comprises a cable bundle, X-direction and Y-direction linear guide rail slide block mechanisms, an X-direction linear motor and a Y-direction driving device, wherein the cable bundle is led out of a planar motor; the Y-direction linear guide rail slide block mechanism is connected with a slide block of the X-direction linear guide rail slide block mechanism through an L-shaped connecting plate; the cable bundle is connected with the slide block of the X-direction linear guide rail slide block mechanism; the Y-direction driving device comprises a micro servo motor, a synchronous belt transmission mechanism and a cantilever supporting rod; the synchronous belt transmission mechanism is arranged along the Y-axis direction. According to the cable table, hard connection between the cable bundle and the planar motor does not exist, so that the cable table can move freely; the distance between the cable table and a mover of the planar motor is controlled in a following mode of a linear grating ruler and a photoelectric position detector, so that the interference of the cable bundle on the mover of the planar motor is avoided, and the influence of the cable bundle on the response speed, the speed in a movement process and the movement positioning accuracy of the working table is further reduced.

Description

technical field [0001] The invention relates to a silicon wafer table and cable table for a lithography machine, which is mainly used in a semiconductor lithography machine and belongs to the field of semiconductor manufacturing equipment. Background technique [0002] In order to meet the demanding requirements of large stroke, high speed and high precision of the silicon wafer table, the traditional cable table usually adopts the structure of orthogonal stacking of engineering plastic drag chains. With the development of maglev silicon wafer stage technology, the thickness of the planar motor mover of the silicon wafer stage gradually becomes thinner, and the number of cables increases. The thickness and width of the cable stage with the orthogonal stacked structure of engineering plastic drag chains gradually reach the limit. , unable to break through; in addition, as the number of cables increases, the quality of the cables also increases, which also interferes with the ...

AI Technical Summary

Problems solved by technology

With the development of maglev silicon wafer stage technology, the thickness of the planar motor mover of the silicon wafer stage gradually becomes thinner, and the number of cables increases. The thickness and width of the cable stage with the orthogonal stacked structure of engineering plastic drag chains gradually reach the limit. , unable to break through; in addition, as the number of cables increases, the quality of the cables also increases, which also interferes with the movement of the planar motor mover of the silicon wafer stage, limiting the movement speed of the planar motor mover of the silicon wafer stage and accuracy, hindering the improvement of its acceleration

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