Tensioning apparatus for mask, mask sheet, and manufacturing system for mask

Abstract

A mask tensioning apparatus is disclosed. In one embodiment, the mask tensioning apparatus includes: i) a clamp supporting a mask sheet disposed on the mask frame to couple the mask sheet to the mask frame and ii) a tensioner connected to the clamp and applying a tensioning force to the clamp to fix the mask sheet fixed by the clamp to the mask. The clamp may be arranged in a substantially vertical or oblique direction with regard to the elongation direction of the mask sheet, thereby supporting the mask sheet.

Description

technical field [0001] The present invention relates to a mask manufacturing system, in particular to a mask stretching device for a vapor deposition mask applied in the manufacture of an organic light emitting display device, a mask sheet and a mask manufacturing system including these. Background technique [0002] An organic light-emitting display device includes two electrodes and an organic light-emitting layer disposed between the two electrodes. Electrons injected from one electrode and holes injected from the other electrode are combined in the organic light-emitting part to form an excitation layer. Excitons emit light while releasing energy. [0003] In order to form such an organic light-emitting layer, it is necessary to vapor-deposit an organic substance onto a substrate. For this purpose, a vapor deposition source loaded with organic substances is heated to vaporize the organic substances and spray them onto the substrate. At this time, a vapor deposition mas...

AI Technical Summary

Problems solved by technology

However, since the existing split mask clamps both ends of the split mask sheet with clamps and applies tensile force along the extending direction of the mask sheet at both ends of the mask sheet, the clips and the stretching force applying device are located at the two ends of the mask sheet. On both sides of the mask frame, depending on the size of the mask frame, the jig and tension applying device occupy a large space

[0005] In particular, as the size of the mask frame has become larger in recent years, the mask frame to which the divided mask sheet is combined is formed to include a plurality of openings. In the state where clamps and tensile force applying devices are installed at both ends, there is a problem that it is difficult for the clamps to clamp the divided mask sheet

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