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Spring structures, oscillators, oscillator arrays and sensors

A technology of spring structure and oscillator, applied in sensor, spring structure to eliminate error, oscillator array field, can solve problems such as backward performance

Active Publication Date: 2016-04-06
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] The aforementioned suspension solution is obviously more compact and better in terms of space utilization than the solution proposed by Bosch, however, it is significantly behind in terms of performance

Method used

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  • Spring structures, oscillators, oscillator arrays and sensors
  • Spring structures, oscillators, oscillator arrays and sensors
  • Spring structures, oscillators, oscillator arrays and sensors

Examples

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Embodiment Construction

[0047] Embodiments of the invention relate, for example, to oscillating micromechanical oscillators such as angular velocity sensors. However, it is not the purpose of this document to limit the proposed spring structure to oscillator structures, nor to limit it to the elimination of mechanical disturbances caused by linear accelerations in differential linear oscillators, but the solution is based on The defined features of the claimed invention can also be applied to cancel interference of other oscillators.

[0048] In the description below, directions such as left, right, up and / or down used for illustration are only examples with reference to the proposed medium, and they do not imply any limitation on the relative orientation of the components, e.g. relative to the surface of the earth The direction of the gravitational field on .

[0049] Figure 5 An illustration of a coupling suspension mechanism according to an embodiment of the invention is shown. The suspension ...

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PUM

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Abstract

The invention relates to a spring structure (501) having at least two masses (Ma, Mb) coupled as an anti-phase oscillator in a first direction via springs (Sh1, Sh2), said springs ( Sh1, Sh2) are connected to the mass (Ma, Mb) via a ring structure (L, E) located at the coupling point connected to the ring structure (L, E) between the springs (Sh1, Sh2), wherein the inclined springs (SI45, Sr45) are connected from the coupling point of the ring structure (L) to the holder (A) of the base, so that the ring structure ( The longitudinal movement of L) is arranged perpendicularly or substantially perpendicularly to said first direction so as to dampen anti-phase oscillations of said masses (Ma, Mb) in addition to anti-phase oscillations. The invention also relates to the use of an oscillator and / or an array of oscillators and a sensor and / or a spring structure in a sensor system.

Description

technical field [0001] The present invention relates generally to oscillator technology, but more particularly to sensors, and in particular to the elimination of errors in these sensors by means of spring structures as set forth in the preambles of the independent claims to which they relate. The invention also relates to an oscillator (as set forth in the preambles of the independent claims to which it relates). The invention also relates to an array of oscillators (as set forth in the preambles of the independent claims to which it relates). The invention also relates to sensors (as set forth in the preambles of the independent claims to which it relates). The invention also relates to a sensor system having at least one oscillator according to the invention. Background technique [0002] Vibration and shock resistance are key characteristics required for angular velocity sensors. In particular, these requirements are extremely stringent in known technical applications...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/574
CPCG01C19/574G01C19/56G01P3/44G01C19/5719
Inventor 安斯·布卢姆奎斯特亚科·罗希奥
Owner MURATA MFG CO LTD
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