Substrate loading manipulator, substrate loading system and pecvd equipment
A manipulator and substrate technology, which is applied to manipulators, conveyor objects, transportation and packaging, etc., can solve the problems of damage to the manipulator, delay in work progress, damage to adsorption parts, etc., so as to reduce maintenance and replacement costs and improve work efficiency. , the effect of avoiding damage
Active Publication Date: 2016-02-10
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
When the film taking manipulator reaches into the material box, if the loading system fails and stops working, the operator is very likely to directly lift the loading table without being familiar with the entire equipment, resulting in the film taking manipulator being blocked. The material box is pressed, which will cause damage to the adsorption piece at the front end of the tablet picking robot, and even bend the arm of the tablet picking robot and cause the bracket to deform
As a result, damage to the film taking manipulator has been caused, maintenance and replacement costs have been increased, and work progress has been delayed
[0003] In addition, in the existing PECVD equipment, the control device for controlling the loading table is usually set to lock the loading table when the loading table fails, that is, the existing PECVD can only realize a single lock for the loading table design
Method used
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[0031] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary, and are only used to explain the present invention, but should not be understood as limiting the present invention.
[0032] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "horizontal", "top", "bottom", " The orientation or positional relationship indicated by "inner" and "outer" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a s...
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The invention discloses a substrate feeding manipulator comprising a support and an arm. The arm is connected on the support and can rotate up and down. The manipulator comprises a substrate absorption part arranged on one end of the arm and used for absorbing a substrate. The manipulator also comprises a rotation detection device which is used for detecting the rotation movement of the arm. According to the substrate feeding manipulator provided by the embodiment of the invention, the arm is rotatably connected on the support. When the movement of the substrate feeding manipulator is restricted, the manipulator can be inter-locked with a feeding bench, such that the damage to the arm or the substrate absorption part is avoided in time, reparation and replacement costs are reduced, working process is not delayed, and working efficiency is improved. The invention also discloses a substrate feeding system and a PECVD device with the substrate feeding system.
Description
Technical field [0001] The present invention relates to the technical field of semiconductor devices, in particular to a substrate loading robot, a substrate loading system having the substrate loading robot, and a PECVD equipment. Background technique [0002] During the working process of the traditional solar flat panel PECVD (plasma enhanced chemical vapor deposition) equipment, the picking manipulator continuously takes out the cells from the magazine of the loading table. When the pickup manipulator reaches into the magazine, if the loading system fails and stops working, at this time, the operator is very likely to directly lift the loading table without being familiar with the entire equipment, which will cause the pickup manipulator to be The material box is compressed, which causes damage to the suction member at the front end of the fetching manipulator, even bending the arm of the fetching manipulator and deforming the bracket. As a result, damage to the fetching man...
Claims
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IPC IPC(8): C23C16/44B25J11/00B25J19/02B65G47/91
Inventor 张文
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD