Direct drive micro-motion stage
A micro-moving platform, direct-drive technology, applied in workbenches, large fixed members, metal processing machinery parts, etc., can solve the problems of large volume and weight, and it is difficult to achieve high-speed and high-precision positioning.
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[0020] In order to further understand the features, technical means, specific objectives and functions achieved by the present invention, and to analyze the advantages and spirit of the present invention, a further understanding of the present invention can be obtained through the following detailed description of the present invention in conjunction with the accompanying drawings and specific embodiments.
[0021] A direct-drive micro-motion platform includes a base 10 and a workbench 20 arranged on the base 10 . The workbench 20 is movably connected with the base 10 and can move on the base 10 . The workbench 20 is circular, and the top of the workbench 20 is transparent.
[0022] There are three sets of linear modules 30 inside the workbench 20, and the three sets of linear modules 30 are fixed on the base 10 in a circular array, and the angle between each two sets of linear modules 30 is 60 degrees. The force directions generated by the operation of the three linear modul...
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